JPH0391576U - - Google Patents

Info

Publication number
JPH0391576U
JPH0391576U JP15268689U JP15268689U JPH0391576U JP H0391576 U JPH0391576 U JP H0391576U JP 15268689 U JP15268689 U JP 15268689U JP 15268689 U JP15268689 U JP 15268689U JP H0391576 U JPH0391576 U JP H0391576U
Authority
JP
Japan
Prior art keywords
magnetic fluid
sealing device
pair
annular magnet
pole pieces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15268689U
Other languages
English (en)
Japanese (ja)
Other versions
JP2508345Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989152686U priority Critical patent/JP2508345Y2/ja
Publication of JPH0391576U publication Critical patent/JPH0391576U/ja
Application granted granted Critical
Publication of JP2508345Y2 publication Critical patent/JP2508345Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
JP1989152686U 1989-12-28 1989-12-28 磁性流体シ―ル装置 Expired - Lifetime JP2508345Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989152686U JP2508345Y2 (ja) 1989-12-28 1989-12-28 磁性流体シ―ル装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989152686U JP2508345Y2 (ja) 1989-12-28 1989-12-28 磁性流体シ―ル装置

Publications (2)

Publication Number Publication Date
JPH0391576U true JPH0391576U (me) 1991-09-18
JP2508345Y2 JP2508345Y2 (ja) 1996-08-21

Family

ID=31698938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989152686U Expired - Lifetime JP2508345Y2 (ja) 1989-12-28 1989-12-28 磁性流体シ―ル装置

Country Status (1)

Country Link
JP (1) JP2508345Y2 (me)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015190502A1 (ja) * 2014-06-12 2015-12-17 東京エレクトロン株式会社 密閉容器及び搬送システム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6246861U (me) * 1985-09-10 1987-03-23

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6246861U (me) * 1985-09-10 1987-03-23

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015190502A1 (ja) * 2014-06-12 2015-12-17 東京エレクトロン株式会社 密閉容器及び搬送システム

Also Published As

Publication number Publication date
JP2508345Y2 (ja) 1996-08-21

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term