JPH0390430U - - Google Patents

Info

Publication number
JPH0390430U
JPH0390430U JP15242889U JP15242889U JPH0390430U JP H0390430 U JPH0390430 U JP H0390430U JP 15242889 U JP15242889 U JP 15242889U JP 15242889 U JP15242889 U JP 15242889U JP H0390430 U JPH0390430 U JP H0390430U
Authority
JP
Japan
Prior art keywords
wafer
rotating shaft
opening slot
spinner device
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15242889U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15242889U priority Critical patent/JPH0390430U/ja
Publication of JPH0390430U publication Critical patent/JPH0390430U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP15242889U 1989-12-28 1989-12-28 Pending JPH0390430U (US07655688-20100202-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15242889U JPH0390430U (US07655688-20100202-C00086.png) 1989-12-28 1989-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15242889U JPH0390430U (US07655688-20100202-C00086.png) 1989-12-28 1989-12-28

Publications (1)

Publication Number Publication Date
JPH0390430U true JPH0390430U (US07655688-20100202-C00086.png) 1991-09-13

Family

ID=31698694

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15242889U Pending JPH0390430U (US07655688-20100202-C00086.png) 1989-12-28 1989-12-28

Country Status (1)

Country Link
JP (1) JPH0390430U (US07655688-20100202-C00086.png)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4863709A (US07655688-20100202-C00086.png) * 1971-11-20 1973-09-04
JPS525269A (en) * 1975-07-02 1977-01-14 Hitachi Ltd Rotary coating device
JPS61176120A (ja) * 1985-01-31 1986-08-07 Nec Corp フオトレジストの現像装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4863709A (US07655688-20100202-C00086.png) * 1971-11-20 1973-09-04
JPS525269A (en) * 1975-07-02 1977-01-14 Hitachi Ltd Rotary coating device
JPS61176120A (ja) * 1985-01-31 1986-08-07 Nec Corp フオトレジストの現像装置

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