JPH0390429U - - Google Patents
Info
- Publication number
- JPH0390429U JPH0390429U JP15252989U JP15252989U JPH0390429U JP H0390429 U JPH0390429 U JP H0390429U JP 15252989 U JP15252989 U JP 15252989U JP 15252989 U JP15252989 U JP 15252989U JP H0390429 U JPH0390429 U JP H0390429U
- Authority
- JP
- Japan
- Prior art keywords
- liquid supply
- chemical liquid
- chemical
- supply pipe
- vaporizer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000126 substance Substances 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 11
- 238000004381 surface treatment Methods 0.000 claims description 4
- 239000006200 vaporizer Substances 0.000 claims description 4
- 239000012071 phase Substances 0.000 claims description 3
- 239000012808 vapor phase Substances 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 230000008016 vaporization Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Pipeline Systems (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Coating Apparatus (AREA)
Description
第１図は本考案の第１実施例に係る気相表面処
理装置の概略構成図、第２図は第２実施例の概略
構成図である。第３図は従来装置の概略構成図で
ある。
１……薬液タンク、６……気相処理室、１２ａ
，１２ｂ……薬液供給配管、１３……気化器、１
４……三方切り換え弁、１５……送り出しガス流
路、１６……第１の液面レベルセンサ、２０……
制御器。
FIG. 1 is a schematic diagram of a vapor phase surface treatment apparatus according to a first embodiment of the present invention, and FIG. 2 is a schematic diagram of a second embodiment. FIG. 3 is a schematic configuration diagram of a conventional device. 1... Chemical tank, 6... Gas phase treatment chamber, 12a
, 12b... Chemical solution supply piping, 13... Vaporizer, 1
4... Three-way switching valve, 15... Sending gas flow path, 16... First liquid level sensor, 20...
controller.
Claims (1)
と、前記薬液の蒸気が供給されることにより被処
理基板に対して所要の表面処理を行う気相処理室
とを備えた気相表面処理装置において、 薬液供給配管を介して前記気化器へ薬液を供給
する薬液供給手段と、 前記薬液供給手段と気化気との間の薬液供給配
管に切り換え弁を介して連結された送り出しガス
供給手段と、 前記切り換え弁と気化器との間の薬液供給配管
に移動可能に付設された液面レベルセンサと、 前記液面レベルセンサからの検出信号に基づき
、前記切り換え弁を制御する制御手段と、 を備えたことを特徴とする気相表面処理装置。[Claims for Utility Model Registration] A vaporizer that vaporizes a chemical solution to generate chemical vapor, and a vapor phase processing chamber that performs a required surface treatment on a substrate to be processed by supplying the vapor of the chemical solution. A gas phase surface treatment apparatus comprising: a chemical liquid supply means for supplying a chemical liquid to the vaporizer via a chemical liquid supply pipe; and a chemical liquid supply pipe connected to the chemical liquid supply pipe between the chemical liquid supply means and the vaporizing gas via a switching valve. a liquid level sensor movably attached to a chemical liquid supply pipe between the switching valve and the vaporizer; and a liquid level sensor that controls the switching valve based on a detection signal from the liquid level sensor. A gas phase surface treatment apparatus comprising: a control means for controlling;
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15252989U JPH0612801Y2 (en) | 1989-12-28 | 1989-12-28 | Vapor surface treatment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15252989U JPH0612801Y2 (en) | 1989-12-28 | 1989-12-28 | Vapor surface treatment equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0390429U true JPH0390429U (en) | 1991-09-13 |
| JPH0612801Y2 JPH0612801Y2 (en) | 1994-04-06 |
Family
ID=31698785
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15252989U Expired - Lifetime JPH0612801Y2 (en) | 1989-12-28 | 1989-12-28 | Vapor surface treatment equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0612801Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013542591A (en) * | 2010-09-08 | 2013-11-21 | モレキュラー・インプリンツ・インコーポレーテッド | Steam supply system for imprint lithography |
-
1989
- 1989-12-28 JP JP15252989U patent/JPH0612801Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013542591A (en) * | 2010-09-08 | 2013-11-21 | モレキュラー・インプリンツ・インコーポレーテッド | Steam supply system for imprint lithography |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0612801Y2 (en) | 1994-04-06 |
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