JPH0389160U - - Google Patents
Info
- Publication number
- JPH0389160U JPH0389160U JP15215289U JP15215289U JPH0389160U JP H0389160 U JPH0389160 U JP H0389160U JP 15215289 U JP15215289 U JP 15215289U JP 15215289 U JP15215289 U JP 15215289U JP H0389160 U JPH0389160 U JP H0389160U
- Authority
- JP
- Japan
- Prior art keywords
- rotation
- rotary shaft
- magnetically coupled
- rotary
- partition wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims description 3
- 238000012544 monitoring process Methods 0.000 claims description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15215289U JPH0389160U (ru) | 1989-12-28 | 1989-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15215289U JPH0389160U (ru) | 1989-12-28 | 1989-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0389160U true JPH0389160U (ru) | 1991-09-11 |
Family
ID=31698427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15215289U Pending JPH0389160U (ru) | 1989-12-28 | 1989-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0389160U (ru) |
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1989
- 1989-12-28 JP JP15215289U patent/JPH0389160U/ja active Pending