JPH0388343U - - Google Patents

Info

Publication number
JPH0388343U
JPH0388343U JP14818189U JP14818189U JPH0388343U JP H0388343 U JPH0388343 U JP H0388343U JP 14818189 U JP14818189 U JP 14818189U JP 14818189 U JP14818189 U JP 14818189U JP H0388343 U JPH0388343 U JP H0388343U
Authority
JP
Japan
Prior art keywords
storage box
predetermined surface
document holder
wafer storage
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14818189U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0810195Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989148181U priority Critical patent/JPH0810195Y2/ja
Publication of JPH0388343U publication Critical patent/JPH0388343U/ja
Application granted granted Critical
Publication of JPH0810195Y2 publication Critical patent/JPH0810195Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Packaging Frangible Articles (AREA)
JP1989148181U 1989-12-22 1989-12-22 半導体ウエハ収納箱 Expired - Lifetime JPH0810195Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989148181U JPH0810195Y2 (ja) 1989-12-22 1989-12-22 半導体ウエハ収納箱

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989148181U JPH0810195Y2 (ja) 1989-12-22 1989-12-22 半導体ウエハ収納箱

Publications (2)

Publication Number Publication Date
JPH0388343U true JPH0388343U (enrdf_load_stackoverflow) 1991-09-10
JPH0810195Y2 JPH0810195Y2 (ja) 1996-03-27

Family

ID=31694642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989148181U Expired - Lifetime JPH0810195Y2 (ja) 1989-12-22 1989-12-22 半導体ウエハ収納箱

Country Status (1)

Country Link
JP (1) JPH0810195Y2 (enrdf_load_stackoverflow)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59109147U (ja) * 1983-01-12 1984-07-23 富士通株式会社 ウエハ収納ケ−ス
JPS618913A (ja) * 1984-06-25 1986-01-16 Hitachi Ltd 収容箱
JPS61153789U (enrdf_load_stackoverflow) * 1985-03-15 1986-09-24
JPS6364631U (enrdf_load_stackoverflow) * 1986-10-17 1988-04-28

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59109147U (ja) * 1983-01-12 1984-07-23 富士通株式会社 ウエハ収納ケ−ス
JPS618913A (ja) * 1984-06-25 1986-01-16 Hitachi Ltd 収容箱
JPS61153789U (enrdf_load_stackoverflow) * 1985-03-15 1986-09-24
JPS6364631U (enrdf_load_stackoverflow) * 1986-10-17 1988-04-28

Also Published As

Publication number Publication date
JPH0810195Y2 (ja) 1996-03-27

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