JPH0388257U - - Google Patents
Info
- Publication number
- JPH0388257U JPH0388257U JP14980989U JP14980989U JPH0388257U JP H0388257 U JPH0388257 U JP H0388257U JP 14980989 U JP14980989 U JP 14980989U JP 14980989 U JP14980989 U JP 14980989U JP H0388257 U JPH0388257 U JP H0388257U
- Authority
- JP
- Japan
- Prior art keywords
- flag faraday
- ion source
- mass spectrometer
- divided
- faraday
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims 3
- 230000005684 electric field Effects 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 claims 1
- 238000000605 extraction Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14980989U JPH0388257U (sv) | 1989-12-25 | 1989-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14980989U JPH0388257U (sv) | 1989-12-25 | 1989-12-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0388257U true JPH0388257U (sv) | 1991-09-10 |
Family
ID=31696184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14980989U Pending JPH0388257U (sv) | 1989-12-25 | 1989-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0388257U (sv) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008060549A (ja) * | 2006-07-18 | 2008-03-13 | Applied Materials Inc | イオン打ち込み装置用ビームストップ |
-
1989
- 1989-12-25 JP JP14980989U patent/JPH0388257U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008060549A (ja) * | 2006-07-18 | 2008-03-13 | Applied Materials Inc | イオン打ち込み装置用ビームストップ |