JPH038637U - - Google Patents
Info
- Publication number
- JPH038637U JPH038637U JP6869089U JP6869089U JPH038637U JP H038637 U JPH038637 U JP H038637U JP 6869089 U JP6869089 U JP 6869089U JP 6869089 U JP6869089 U JP 6869089U JP H038637 U JPH038637 U JP H038637U
- Authority
- JP
- Japan
- Prior art keywords
- resistor
- flow rate
- hot wire
- intake passage
- resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
- Electrical Control Of Air Or Fuel Supplied To Internal-Combustion Engine (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6869089U JPH0641133Y2 (ja) | 1989-06-13 | 1989-06-13 | 熱線式流量計 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6869089U JPH0641133Y2 (ja) | 1989-06-13 | 1989-06-13 | 熱線式流量計 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH038637U true JPH038637U (zh) | 1991-01-28 |
JPH0641133Y2 JPH0641133Y2 (ja) | 1994-10-26 |
Family
ID=31603341
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6869089U Expired - Lifetime JPH0641133Y2 (ja) | 1989-06-13 | 1989-06-13 | 熱線式流量計 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0641133Y2 (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53135041U (zh) * | 1977-03-30 | 1978-10-25 | ||
JPS5549959U (zh) * | 1978-09-28 | 1980-04-01 | ||
JPS5676482U (zh) * | 1979-11-15 | 1981-06-22 | ||
JPH08203832A (ja) * | 1993-12-30 | 1996-08-09 | Tokyo Electron Ltd | 半導体製造装置 |
-
1989
- 1989-06-13 JP JP6869089U patent/JPH0641133Y2/ja not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53135041U (zh) * | 1977-03-30 | 1978-10-25 | ||
JPS5549959U (zh) * | 1978-09-28 | 1980-04-01 | ||
JPS5676482U (zh) * | 1979-11-15 | 1981-06-22 | ||
JPH08203832A (ja) * | 1993-12-30 | 1996-08-09 | Tokyo Electron Ltd | 半導体製造装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0641133Y2 (ja) | 1994-10-26 |
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