JPH0385633U - - Google Patents
Info
- Publication number
- JPH0385633U JPH0385633U JP14726289U JP14726289U JPH0385633U JP H0385633 U JPH0385633 U JP H0385633U JP 14726289 U JP14726289 U JP 14726289U JP 14726289 U JP14726289 U JP 14726289U JP H0385633 U JPH0385633 U JP H0385633U
- Authority
- JP
- Japan
- Prior art keywords
- quartz glass
- transparent quartz
- heating lamps
- semiconductor wafer
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 3
- 238000000137 annealing Methods 0.000 description 2
- -1 Tungsten halogen Chemical class 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14726289U JPH0385633U (ko) | 1989-12-20 | 1989-12-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14726289U JPH0385633U (ko) | 1989-12-20 | 1989-12-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0385633U true JPH0385633U (ko) | 1991-08-29 |
Family
ID=31693787
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14726289U Pending JPH0385633U (ko) | 1989-12-20 | 1989-12-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0385633U (ko) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6146732B2 (ko) * | 1980-06-11 | 1986-10-15 | Matsushita Electric Ind Co Ltd |
-
1989
- 1989-12-20 JP JP14726289U patent/JPH0385633U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6146732B2 (ko) * | 1980-06-11 | 1986-10-15 | Matsushita Electric Ind Co Ltd |