JPH038313U - - Google Patents
Info
- Publication number
- JPH038313U JPH038313U JP6848289U JP6848289U JPH038313U JP H038313 U JPH038313 U JP H038313U JP 6848289 U JP6848289 U JP 6848289U JP 6848289 U JP6848289 U JP 6848289U JP H038313 U JPH038313 U JP H038313U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- plating layer
- metal plating
- electrode pattern
- optical deflector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 3
- 238000007747 plating Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 1
- 238000000206 photolithography Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Mechanical Optical Scanning Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6848289U JPH038313U (US06346242-20020212-C00066.png) | 1989-06-12 | 1989-06-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6848289U JPH038313U (US06346242-20020212-C00066.png) | 1989-06-12 | 1989-06-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH038313U true JPH038313U (US06346242-20020212-C00066.png) | 1991-01-25 |
Family
ID=31602959
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6848289U Pending JPH038313U (US06346242-20020212-C00066.png) | 1989-06-12 | 1989-06-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH038313U (US06346242-20020212-C00066.png) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002116402A (ja) * | 2000-10-05 | 2002-04-19 | Miyota Kk | 光偏向素子及びその製造方法 |
| WO2002035275A1 (fr) * | 2000-10-25 | 2002-05-02 | The Nippon Signal Co., Ltd | Actionneur |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63197911A (ja) * | 1987-02-12 | 1988-08-16 | Konica Corp | 画像信号用光偏向子 |
-
1989
- 1989-06-12 JP JP6848289U patent/JPH038313U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63197911A (ja) * | 1987-02-12 | 1988-08-16 | Konica Corp | 画像信号用光偏向子 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002116402A (ja) * | 2000-10-05 | 2002-04-19 | Miyota Kk | 光偏向素子及びその製造方法 |
| JP4526676B2 (ja) * | 2000-10-05 | 2010-08-18 | シチズンファインテックミヨタ株式会社 | 光偏向素子及びその製造方法 |
| WO2002035275A1 (fr) * | 2000-10-25 | 2002-05-02 | The Nippon Signal Co., Ltd | Actionneur |
| KR100845398B1 (ko) * | 2000-10-25 | 2008-07-10 | 더 니뽄 시그널 컴파니, 리미티드 | 액튜에이터 |
