JPH0380143U - - Google Patents

Info

Publication number
JPH0380143U
JPH0380143U JP14122489U JP14122489U JPH0380143U JP H0380143 U JPH0380143 U JP H0380143U JP 14122489 U JP14122489 U JP 14122489U JP 14122489 U JP14122489 U JP 14122489U JP H0380143 U JPH0380143 U JP H0380143U
Authority
JP
Japan
Prior art keywords
toothed belt
holder
belt
driven
interlocked
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14122489U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14122489U priority Critical patent/JPH0380143U/ja
Publication of JPH0380143U publication Critical patent/JPH0380143U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Pulleys (AREA)
  • Devices For Conveying Motion By Means Of Endless Flexible Members (AREA)
JP14122489U 1989-12-05 1989-12-05 Pending JPH0380143U (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14122489U JPH0380143U (en, 2012) 1989-12-05 1989-12-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14122489U JPH0380143U (en, 2012) 1989-12-05 1989-12-05

Publications (1)

Publication Number Publication Date
JPH0380143U true JPH0380143U (en, 2012) 1991-08-16

Family

ID=31688138

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14122489U Pending JPH0380143U (en, 2012) 1989-12-05 1989-12-05

Country Status (1)

Country Link
JP (1) JPH0380143U (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI397495B (zh) * 2006-01-06 2013-06-01 Tokyo Electron Ltd A substrate transfer device and a substrate support

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI397495B (zh) * 2006-01-06 2013-06-01 Tokyo Electron Ltd A substrate transfer device and a substrate support

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