JPH0380143U - - Google Patents
Info
- Publication number
- JPH0380143U JPH0380143U JP14122489U JP14122489U JPH0380143U JP H0380143 U JPH0380143 U JP H0380143U JP 14122489 U JP14122489 U JP 14122489U JP 14122489 U JP14122489 U JP 14122489U JP H0380143 U JPH0380143 U JP H0380143U
- Authority
- JP
- Japan
- Prior art keywords
- toothed belt
- holder
- belt
- driven
- interlocked
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009434 installation Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Pulleys (AREA)
- Devices For Conveying Motion By Means Of Endless Flexible Members (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14122489U JPH0380143U (en, 2012) | 1989-12-05 | 1989-12-05 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14122489U JPH0380143U (en, 2012) | 1989-12-05 | 1989-12-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0380143U true JPH0380143U (en, 2012) | 1991-08-16 |
Family
ID=31688138
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14122489U Pending JPH0380143U (en, 2012) | 1989-12-05 | 1989-12-05 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0380143U (en, 2012) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI397495B (zh) * | 2006-01-06 | 2013-06-01 | Tokyo Electron Ltd | A substrate transfer device and a substrate support |
-
1989
- 1989-12-05 JP JP14122489U patent/JPH0380143U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI397495B (zh) * | 2006-01-06 | 2013-06-01 | Tokyo Electron Ltd | A substrate transfer device and a substrate support |