JPH0379286U - - Google Patents
Info
- Publication number
- JPH0379286U JPH0379286U JP13662989U JP13662989U JPH0379286U JP H0379286 U JPH0379286 U JP H0379286U JP 13662989 U JP13662989 U JP 13662989U JP 13662989 U JP13662989 U JP 13662989U JP H0379286 U JPH0379286 U JP H0379286U
- Authority
- JP
- Japan
- Prior art keywords
- suction
- mask
- blower
- constituting
- large number
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Description
第１図は本考案の実施例を示す一部切欠斜視図
、第２図はその要部の拡大断面図、第３図は使用
状態を示す側面図、第４図は同じく使用状態を示
す下面図、第５図は実施例における吸着マスク面
のオリフイス孔の開放されている数と吸引ヘツド
内部の静圧の関係を示す図、第６図はオリフイス
孔からの空気吸引状態を説明する模式的な断面図
である。
１……吸引ヘツド、２……吸着マスク、３……
オリフイス孔。
Fig. 1 is a partially cutaway perspective view showing an embodiment of the present invention, Fig. 2 is an enlarged sectional view of its main parts, Fig. 3 is a side view showing the state of use, and Fig. 4 is a bottom view also showing the state of use. Figure 5 is a diagram showing the relationship between the number of orifice holes opened on the suction mask surface and the static pressure inside the suction head in the example, and Figure 6 is a schematic diagram illustrating the state of air suction from the orifice hole. FIG. 1...Suction head, 2...Suction mask, 3...
Orifice hole.
Claims (1)
着面を構成する吸着マスク２に、多数の小径のオ
リフイス孔３を均等に形成したことを特徴とする
有孔板状部材の吸着装置。 A suction device for a perforated plate-like member, characterized in that a large number of small-diameter orifice holes 3 are evenly formed in a suction mask 2 constituting the suction surface of a suction head 1 connected to the suction side of a blower.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989136629U JPH0511990Y2 (en) | 1989-11-24 | 1989-11-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989136629U JPH0511990Y2 (en) | 1989-11-24 | 1989-11-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0379286U true JPH0379286U (en) | 1991-08-13 |
| JPH0511990Y2 JPH0511990Y2 (en) | 1993-03-25 |
Family
ID=31683827
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989136629U Expired - Lifetime JPH0511990Y2 (en) | 1989-11-24 | 1989-11-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0511990Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008087883A (en) * | 2006-09-29 | 2008-04-17 | Dainippon Screen Mfg Co Ltd | Substrate taking-out device and method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5313045A (en) * | 1976-07-22 | 1978-02-06 | Ishikawajima Harima Heavy Ind Co Ltd | Air bearing and vacuum adsorption device |
-
1989
- 1989-11-24 JP JP1989136629U patent/JPH0511990Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5313045A (en) * | 1976-07-22 | 1978-02-06 | Ishikawajima Harima Heavy Ind Co Ltd | Air bearing and vacuum adsorption device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008087883A (en) * | 2006-09-29 | 2008-04-17 | Dainippon Screen Mfg Co Ltd | Substrate taking-out device and method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0511990Y2 (en) | 1993-03-25 |