JPH0379156U - - Google Patents

Info

Publication number

JPH0379156U

JPH0379156U JP14087489U JP14087489U JPH0379156U JP H0379156 U JPH0379156 U JP H0379156U JP 14087489 U JP14087489 U JP 14087489U JP 14087489 U JP14087489 U JP 14087489U JP H0379156 U JPH0379156 U JP H0379156U

Authority

JP

Japan

Prior art keywords

charged particle

particle beam

cup

aperture

faraday cup

Prior art date

1989-12-05

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000002245 particle Substances 0.000 claims description 7
• 230000003287 optical effect Effects 0.000 claims 1
• 239000002184 metal Substances 0.000 description 2
• 238000010586 diagram Methods 0.000 description 1
• 239000003989 dielectric material Substances 0.000 description 1
• WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1