JPH0378060U - - Google Patents
Info
- Publication number
- JPH0378060U JPH0378060U JP14010489U JP14010489U JPH0378060U JP H0378060 U JPH0378060 U JP H0378060U JP 14010489 U JP14010489 U JP 14010489U JP 14010489 U JP14010489 U JP 14010489U JP H0378060 U JPH0378060 U JP H0378060U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- vacuum chamber
- rotary table
- mounting
- board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14010489U JPH0627650Y2 (ja) | 1989-12-01 | 1989-12-01 | 基板の搬出入処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14010489U JPH0627650Y2 (ja) | 1989-12-01 | 1989-12-01 | 基板の搬出入処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0378060U true JPH0378060U (en, 2012) | 1991-08-07 |
| JPH0627650Y2 JPH0627650Y2 (ja) | 1994-07-27 |
Family
ID=31687102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14010489U Expired - Lifetime JPH0627650Y2 (ja) | 1989-12-01 | 1989-12-01 | 基板の搬出入処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0627650Y2 (en, 2012) |
-
1989
- 1989-12-01 JP JP14010489U patent/JPH0627650Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0627650Y2 (ja) | 1994-07-27 |