JPH0378059U - - Google Patents
Info
- Publication number
- JPH0378059U JPH0378059U JP13808389U JP13808389U JPH0378059U JP H0378059 U JPH0378059 U JP H0378059U JP 13808389 U JP13808389 U JP 13808389U JP 13808389 U JP13808389 U JP 13808389U JP H0378059 U JPH0378059 U JP H0378059U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum vessel
- vacuum
- cryopanel
- heat shield
- vessel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 2
- 239000003507 refrigerant Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 8
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13808389U JPH0378059U (enExample) | 1989-11-30 | 1989-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13808389U JPH0378059U (enExample) | 1989-11-30 | 1989-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0378059U true JPH0378059U (enExample) | 1991-08-07 |
Family
ID=31685210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13808389U Pending JPH0378059U (enExample) | 1989-11-30 | 1989-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0378059U (enExample) |
-
1989
- 1989-11-30 JP JP13808389U patent/JPH0378059U/ja active Pending
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