JPH0376843B2 - - Google Patents

Info

Publication number
JPH0376843B2
JPH0376843B2 JP59145697A JP14569784A JPH0376843B2 JP H0376843 B2 JPH0376843 B2 JP H0376843B2 JP 59145697 A JP59145697 A JP 59145697A JP 14569784 A JP14569784 A JP 14569784A JP H0376843 B2 JPH0376843 B2 JP H0376843B2
Authority
JP
Japan
Prior art keywords
light
diffraction grating
laser light
plane
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59145697A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6123902A (ja
Inventor
Kazuhiro Nishihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Idec Corp
Original Assignee
Idec Izumi Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Idec Izumi Corp filed Critical Idec Izumi Corp
Priority to JP14569784A priority Critical patent/JPS6123902A/ja
Publication of JPS6123902A publication Critical patent/JPS6123902A/ja
Publication of JPH0376843B2 publication Critical patent/JPH0376843B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/30—Grating as beam-splitter

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP14569784A 1984-07-12 1984-07-12 座標軸設定用干渉計 Granted JPS6123902A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14569784A JPS6123902A (ja) 1984-07-12 1984-07-12 座標軸設定用干渉計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14569784A JPS6123902A (ja) 1984-07-12 1984-07-12 座標軸設定用干渉計

Publications (2)

Publication Number Publication Date
JPS6123902A JPS6123902A (ja) 1986-02-01
JPH0376843B2 true JPH0376843B2 (en, 2012) 1991-12-06

Family

ID=15391012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14569784A Granted JPS6123902A (ja) 1984-07-12 1984-07-12 座標軸設定用干渉計

Country Status (1)

Country Link
JP (1) JPS6123902A (en, 2012)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5206706A (en) * 1991-07-01 1993-04-27 Bell Communications Research, Inc. Alignment of an ellipsometer or other optical instrument using a diffraction grating
DE19602445A1 (de) 1996-01-24 1997-07-31 Nanopro Luftlager Produktions Vorrichtung und Verfahren zum Vermessen von zwei einander gegenüberliegenden Oberflächen eines Körpers
US7057741B1 (en) 1999-06-18 2006-06-06 Kla-Tencor Corporation Reduced coherence symmetric grazing incidence differential interferometer

Also Published As

Publication number Publication date
JPS6123902A (ja) 1986-02-01

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