JPH0375879U - - Google Patents
Info
- Publication number
- JPH0375879U JPH0375879U JP13431889U JP13431889U JPH0375879U JP H0375879 U JPH0375879 U JP H0375879U JP 13431889 U JP13431889 U JP 13431889U JP 13431889 U JP13431889 U JP 13431889U JP H0375879 U JPH0375879 U JP H0375879U
- Authority
- JP
- Japan
- Prior art keywords
- container
- fluid
- pump
- supplies
- control valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims 3
- 239000011261 inert gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Description
第１図はこの考案の一実施例を示す配置図、第
２図は従来のこの種レジストコーターを示す配置
図である。
図中、１……容器、２……レジスト材、３……
Ｎ２ガス用のフイルター、４……電磁弁、５……
レジスト材用のフイルタ、６……ポンプである。
なお図中同一符号は同一または相当部分を示す。
FIG. 1 is a layout diagram showing an embodiment of this invention, and FIG. 2 is a layout diagram showing a conventional resist coater of this type. In the figure, 1... Container, 2... Resist material, 3...
Filter for N2 gas, 4... Solenoid valve, 5...
Filter for resist material, 6...pump.
Note that the same reference numerals in the figures indicate the same or corresponding parts.
Claims (1)
容器内へ不活性ガスを供給して流体に微圧を加え
る制御弁を備えた流体送給装置。 A fluid supply device comprising a pump that pumps out fluid contained in a container, and a control valve that supplies an inert gas into the container to apply slight pressure to the fluid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13431889U JPH0375879U (en) | 1989-11-17 | 1989-11-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13431889U JPH0375879U (en) | 1989-11-17 | 1989-11-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0375879U true JPH0375879U (en) | 1991-07-30 |
Family
ID=31681662
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13431889U Pending JPH0375879U (en) | 1989-11-17 | 1989-11-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0375879U (en) |
-
1989
- 1989-11-17 JP JP13431889U patent/JPH0375879U/ja active Pending
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