JPH0273729U - - Google Patents
Info
- Publication number
- JPH0273729U JPH0273729U JP15371888U JP15371888U JPH0273729U JP H0273729 U JPH0273729 U JP H0273729U JP 15371888 U JP15371888 U JP 15371888U JP 15371888 U JP15371888 U JP 15371888U JP H0273729 U JPH0273729 U JP H0273729U
- Authority
- JP
- Japan
- Prior art keywords
- photoresist
- liquid
- liquid supply
- supply pipe
- photoresist coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 9
- 229920002120 photoresistant polymer Polymers 0.000 claims description 6
- 230000002265 prevention Effects 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 1
Description
第１図及び第２図はそれぞれ本考案の第１の実
施例及び第２の実施例を示す給液管の断面図であ
る。
１……給液管、２……ホトレジスト液面、３…
…逆流防止弁、４……キヤツプ。
1 and 2 are cross-sectional views of a liquid supply pipe showing a first embodiment and a second embodiment of the present invention, respectively. 1...Liquid supply pipe, 2...Photoresist liquid level, 3...
...Return prevention valve, 4...cap.
Claims (1)
液管を含むホトレジスト給液部を備えてなるホト
レジスト塗布装置において、前記給液管の先端部
にホトレジスト液の逆流防止機構が設けられてい
ることを特徴とするホトレジスト塗布装置。 A photoresist coating apparatus comprising a photoresist liquid supply section including a liquid supply pipe inserted into a chemical liquid bottle containing photoresist liquid, characterized in that a backflow prevention mechanism for photoresist liquid is provided at the tip of the liquid supply pipe. Photoresist coating equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15371888U JPH0273729U (en) | 1988-11-25 | 1988-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15371888U JPH0273729U (en) | 1988-11-25 | 1988-11-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0273729U true JPH0273729U (en) | 1990-06-05 |
Family
ID=31429806
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15371888U Pending JPH0273729U (en) | 1988-11-25 | 1988-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0273729U (en) |
-
1988
- 1988-11-25 JP JP15371888U patent/JPH0273729U/ja active Pending
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