JPH0375878U - - Google Patents
Info
- Publication number
- JPH0375878U JPH0375878U JP13832389U JP13832389U JPH0375878U JP H0375878 U JPH0375878 U JP H0375878U JP 13832389 U JP13832389 U JP 13832389U JP 13832389 U JP13832389 U JP 13832389U JP H0375878 U JPH0375878 U JP H0375878U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- spin chuck
- balancer
- attached
- rotation processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 7
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13832389U JPH0719582Y2 (ja) | 1989-11-28 | 1989-11-28 | 基板の回転処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13832389U JPH0719582Y2 (ja) | 1989-11-28 | 1989-11-28 | 基板の回転処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0375878U true JPH0375878U (cs) | 1991-07-30 |
| JPH0719582Y2 JPH0719582Y2 (ja) | 1995-05-10 |
Family
ID=31685430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13832389U Expired - Lifetime JPH0719582Y2 (ja) | 1989-11-28 | 1989-11-28 | 基板の回転処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0719582Y2 (cs) |
-
1989
- 1989-11-28 JP JP13832389U patent/JPH0719582Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0719582Y2 (ja) | 1995-05-10 |
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