JPH0375530U - - Google Patents

Info

Publication number

JPH0375530U

JPH0375530U JP13617489U JP13617489U JPH0375530U JP H0375530 U JPH0375530 U JP H0375530U JP 13617489 U JP13617489 U JP 13617489U JP 13617489 U JP13617489 U JP 13617489U JP H0375530 U JPH0375530 U JP H0375530U

Authority

JP

Japan

Prior art keywords

spin

rinsing liquid

spin chuck

rotating

chuck

Prior art date

1989-11-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000007788 liquid Substances 0.000 claims description 4
• 239000000758 substrate Substances 0.000 claims description 2
• 239000011248 coating agent Substances 0.000 claims 1
• 238000000576 coating method Methods 0.000 claims 1
• 239000007791 liquid phase Substances 0.000 claims 1
• 230000002093 peripheral effect Effects 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2

Cited By (1)