JPH0374663U - - Google Patents
Info
- Publication number
- JPH0374663U JPH0374663U JP13606789U JP13606789U JPH0374663U JP H0374663 U JPH0374663 U JP H0374663U JP 13606789 U JP13606789 U JP 13606789U JP 13606789 U JP13606789 U JP 13606789U JP H0374663 U JPH0374663 U JP H0374663U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- plasma
- substrate
- thin film
- parallel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13606789U JPH0374663U (de) | 1989-11-27 | 1989-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13606789U JPH0374663U (de) | 1989-11-27 | 1989-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0374663U true JPH0374663U (de) | 1991-07-26 |
Family
ID=31683297
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13606789U Pending JPH0374663U (de) | 1989-11-27 | 1989-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0374663U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013147437A1 (ko) * | 2012-03-28 | 2013-10-03 | (주)지니아텍 | 하이브리드 라디칼 플라즈마 그래핀 에칭 장치 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6257710A (ja) * | 1985-09-06 | 1987-03-13 | Sumitomo Metal Ind Ltd | 形鋼の表面手入れ方法 |
-
1989
- 1989-11-27 JP JP13606789U patent/JPH0374663U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6257710A (ja) * | 1985-09-06 | 1987-03-13 | Sumitomo Metal Ind Ltd | 形鋼の表面手入れ方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013147437A1 (ko) * | 2012-03-28 | 2013-10-03 | (주)지니아텍 | 하이브리드 라디칼 플라즈마 그래핀 에칭 장치 |