JPH0374662U - - Google Patents

Info

Publication number
JPH0374662U
JPH0374662U JP13415689U JP13415689U JPH0374662U JP H0374662 U JPH0374662 U JP H0374662U JP 13415689 U JP13415689 U JP 13415689U JP 13415689 U JP13415689 U JP 13415689U JP H0374662 U JPH0374662 U JP H0374662U
Authority
JP
Japan
Prior art keywords
magnet
plasma
annular
annular electrodes
cylindrical base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13415689U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0623571Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13415689U priority Critical patent/JPH0623571Y2/ja
Publication of JPH0374662U publication Critical patent/JPH0374662U/ja
Application granted granted Critical
Publication of JPH0623571Y2 publication Critical patent/JPH0623571Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
JP13415689U 1989-11-17 1989-11-17 プラズマｃｖｄ装置 Expired - Fee Related JPH0623571Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13415689U JPH0623571Y2 (ja) 1989-11-17 1989-11-17 プラズマｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13415689U JPH0623571Y2 (ja) 1989-11-17 1989-11-17 プラズマｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPH0374662U true JPH0374662U (en:Method) 1991-07-26
JPH0623571Y2 JPH0623571Y2 (ja) 1994-06-22

Family

ID=31681515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13415689U Expired - Fee Related JPH0623571Y2 (ja) 1989-11-17 1989-11-17 プラズマｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPH0623571Y2 (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014169469A (ja) * 2013-03-01 2014-09-18 Denso Corp 真空成膜装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014169469A (ja) * 2013-03-01 2014-09-18 Denso Corp 真空成膜装置

Also Published As

Publication number Publication date
JPH0623571Y2 (ja) 1994-06-22

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees