JPH0374461U - - Google Patents
Info
- Publication number
- JPH0374461U JPH0374461U JP13614689U JP13614689U JPH0374461U JP H0374461 U JPH0374461 U JP H0374461U JP 13614689 U JP13614689 U JP 13614689U JP 13614689 U JP13614689 U JP 13614689U JP H0374461 U JPH0374461 U JP H0374461U
- Authority
- JP
- Japan
- Prior art keywords
- transport chamber
- slit
- ion
- target
- deflection electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 6
- 150000002500 ions Chemical class 0.000 claims 6
- 238000010586 diagram Methods 0.000 description 6
- 238000005468 ion implantation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13614689U JPH0374461U (fi) | 1989-11-22 | 1989-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13614689U JPH0374461U (fi) | 1989-11-22 | 1989-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0374461U true JPH0374461U (fi) | 1991-07-26 |
Family
ID=31683370
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13614689U Pending JPH0374461U (fi) | 1989-11-22 | 1989-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0374461U (fi) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008536309A (ja) * | 2005-04-02 | 2008-09-04 | バリアン・セミコンダクター・エクイップメント・アソシエイツ・インコーポレイテッド | 高速イオンビーム制御を用いた固定ビームによるイオン注入処理におけるグリッチからの回復方法及び装置 |
-
1989
- 1989-11-22 JP JP13614689U patent/JPH0374461U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008536309A (ja) * | 2005-04-02 | 2008-09-04 | バリアン・セミコンダクター・エクイップメント・アソシエイツ・インコーポレイテッド | 高速イオンビーム制御を用いた固定ビームによるイオン注入処理におけるグリッチからの回復方法及び装置 |