JPH0373636B2 - - Google Patents
Info
- Publication number
- JPH0373636B2 JPH0373636B2 JP5943086A JP5943086A JPH0373636B2 JP H0373636 B2 JPH0373636 B2 JP H0373636B2 JP 5943086 A JP5943086 A JP 5943086A JP 5943086 A JP5943086 A JP 5943086A JP H0373636 B2 JPH0373636 B2 JP H0373636B2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- chamber
- steel strip
- seal
- roll
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910000831 Steel Inorganic materials 0.000 claims description 30
- 239000010959 steel Substances 0.000 claims description 30
- 238000007789 sealing Methods 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 11
- 238000007747 plating Methods 0.000 claims description 9
- 238000007738 vacuum evaporation Methods 0.000 claims description 9
- 238000007740 vapor deposition Methods 0.000 claims description 8
- 238000000151 deposition Methods 0.000 description 8
- 230000008021 deposition Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 238000001816 cooling Methods 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000005246 galvanizing Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000004886 process control Methods 0.000 description 2
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- 229910001335 Galvanized steel Inorganic materials 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000008397 galvanized steel Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Heat Treatment Of Strip Materials And Filament Materials (AREA)
Description
＜技術分野＞
本発明は真空蒸着メツキにおける真空室のシー
ル方法に関し、更に詳しくは真空室でのシールロ
ールによる鋼帯表面のロール疵等の発生を防止し
たシール方法に関する。
＜従来技術とその問題点＞
連続式真空蒸着メツキは蒸着室に鋼帯を導き、
メツキ金属を加熱蒸発させて鋼帯表面に蒸着させ
ることによりメツキ層を形成するものであり、蒸
着雰囲気の影響を出来るだけ少なくし、かつ走行
する鋼帯表面に連続的に金属を蒸着するために、
蒸着室を真空にする必要がある。かのため、前処
理炉出側から蒸着室までを適当な数の真空室に区
画して大気圧から蒸着室までの圧力勾配を形成す
る真空シール室を設けている。また同様の真空シ
ール室が蒸着室の出側にも設置されており、それ
ぞれ蒸着室の入側と出側の真空を確保している。
上記真空シール室は、鋼帯を挟む上下のシールロ
ール、シールバー、およびケーシングとから構成
されており、シールロールとシールバーの間およ
びシールロール側面とケーシンクとの間の間隙を
小くすることにより流入しようとする気体の流動
抵抗を大きくしてシール効果を達成している。ま
た上下のシールロールは鋼帯板厚の変化に対応出
来るよう上下動自在に設置されている。
ところで、従来提案されている上記真空シール
室の構成はシール効果を高めるために上下のシー
ルロールで鋼帯をピンチしており、鋼帯表面にシ
ールロールが圧接するので該表面にロール疵等が
生じ易い問題があつた。
上記ロール疵等を防止するには鋼帯をガス等で
フローテングすることが考えられるが、真空圧力
部分であるので実施し難い。
＜問題解決の手段＞
本発明者は、真空シール室のシールロールが鋼
帯表面に密着していなくても、その間隙が一定量
以下であれば、シール効果を損なわず、しかもシ
ールロールが鋼帯表面に接触しないのでロール疵
等の発生も防止出来ることを見出した。
本発明は上記知見に基くものであり、本発明に
よれば、真空蒸着室に連設された真空シール室の
シールロール間の間隙を鋼帯厚さにより最大0.5
mm大きく保つてシールすることを特徴とする真空
蒸着メツキにおけるシール方法が提供される。
またその好適な実施態様として、鋼帯の接続部
を予めトラツキングし、その検出信号に基いてシ
ールロールの間隙を制御するシール方法が提供さ
れる。
以下、本発明を図面を参照して説明する。
連続式真空蒸着メツキ装置にはいくつかの様式
が提案されており、第１図に例示するものは両面
メツキを行なえるように蒸着室を２室有するもの
である。該装置には前処理炉２、ガス冷却室３、
賦圧室４、第１真空シール室５、第１蒸着室６、
中間真空シール室７、第２蒸着室８、第２真空シ
ール室９、冷却室１０が順次設けられている。
上記各真空シール室５，７，９はその内部が複
数段の真空室に区画さておりこれら各真空室およ
び蒸着室６，８には夫々排気系１１が付設され、
内部を所定の真空圧に保つている。
上記各真空シール室にはシールロール１２が必
要個数だけ鋼帯１を上下に挟んで配置されてお
り、各シールロール１２の上下の間隔は鋼帯１の
板厚より最大0.5mm大きく設定されている。
該ロール間隔が上記設定値より大きい場合には
鋼帯表面のロール疵等は殆ど生じないが、シール
効果が著しく低下し、所定真空圧を保つのが困難
になる。
シールロールの間隙を制御するにはロール両端
のロールチヨツクにジヤツキ等の昇降装置を設け
れば良い。尚、シール効果を得るにはシールロー
ルに代えて堰板を用いることもできるが鋼帯表面
に疵を生じ易いので一般にシールロールが用いら
れている。本発明は鋼帯表面とシールロールとの
間に所定間隙を設けるものであり、従つてその本
質からして上記堰板にも適用できる。
次に板厚の異なる鋼帯を連続的に蒸着メツキす
る場合には、鋼帯の溶接した接続部をトラツキン
グし、その検出信号に応じてシールロールの間隙
を調整すれば良い。この制御の一例を第２図に示
す。図示するようにプロセス制御部に予め鋼帯の
板厚情報が入力されており、該プロセス制御部に
更に溶接点のトラツキング情報が入力される。ト
ラツキングの方法は既知の手段を用いればよく、
例えば溶接部に小孔を設け搬送方向に複数個設置
したセンサーにより該小孔を検出して溶接部の進
行を把握する方法等を用いることが出来る。これ
らの情報はロール位置制御部に伝達され、これに
基づく制御信号が駆動モータ２０に伝達される。
駆動モータ２０にはジヤツキ２１が連結し、シー
ルロール２２のロールチヨツク２３が該ジヤツキ
２１に支持されている。駆動モータ２０は制御信
号により駆動し、ジヤツキ２１を昇降させ、ロー
ルチヨツク２３を上下に移動してシールロール２
２の間隙を調整する。ロール位置の変位量はセン
サーにより検出されるロール位置制御部にフイー
ドバツクされる。
＜実施例＞
第１図に示す連続式真空蒸着亜鉛メツキ装置に
より、次の操業条件下で亜鉛メツキ鋼板を製造し
た。この結果を第１表に示す。
鋼帯：板厚0.8mm、板幅914mm、の炭素鋼
ライン速度：100ｍ／min
付着量：60ｇ／m2（両面めつき）
第１第２蒸着室真空度：0.018Torr
第１真空シール室：６段の真空室
各室の真空度−760、120、54、14、２、
0.5Torr
第２真空シール室：７段の真空室
各室の真空度−0.5、２、14、54、120、350、
760Torr
第１表に示されるように、本発明のシール方法
によるものは鋼帯表面の疵が少なく、また所定の
真空圧力を保持するための排気系の負担もそれ程
大きくはない。ロール間隙が大き過ぎるものは鋼
帯表面の疵は認られないものの所定の真空圧力を
保持し難い。
<Technical Field> The present invention relates to a method for sealing a vacuum chamber in vacuum evaporation plating, and more particularly to a sealing method that prevents the occurrence of roll flaws, etc. on the surface of a steel strip caused by a seal roll in a vacuum chamber. <Prior art and its problems> Continuous vacuum evaporation plating involves guiding a steel strip into a evaporation chamber,
The plating layer is formed by heating and evaporating the plating metal and depositing it on the surface of the steel strip.In order to minimize the influence of the deposition atmosphere and to continuously deposit the metal on the surface of the running steel strip. ,
It is necessary to evacuate the deposition chamber. For this reason, the area from the outlet side of the pretreatment furnace to the deposition chamber is divided into an appropriate number of vacuum chambers, and a vacuum seal chamber is provided to form a pressure gradient from atmospheric pressure to the deposition chamber. A similar vacuum seal chamber is also installed on the exit side of the deposition chamber, ensuring vacuum on the entrance and exit sides of the deposition chamber, respectively.
The vacuum seal chamber is composed of upper and lower seal rolls sandwiching a steel strip, a seal bar, and a casing, and the gap between the seal roll and the seal bar and between the side surface of the seal roll and the casing is reduced. The sealing effect is achieved by increasing the flow resistance of the gas trying to flow in. In addition, the upper and lower seal rolls are installed to be able to move up and down to accommodate changes in the thickness of the steel strip. By the way, in the structure of the vacuum sealing chamber that has been proposed in the past, the steel strip is pinched between upper and lower seal rolls in order to enhance the sealing effect, and since the seal rolls are in pressure contact with the surface of the steel strip, roll flaws etc. may occur on the surface. There was a problem that could easily occur. In order to prevent the above-mentioned roll flaws, etc., it may be possible to float the steel strip with a gas or the like, but this is difficult to carry out since the part is under vacuum pressure. <Means for solving the problem> The present inventor has discovered that even if the seal roll in the vacuum seal chamber is not in close contact with the surface of the steel strip, as long as the gap is less than a certain amount, the sealing effect will not be impaired. It has been found that since it does not come into contact with the surface of the strip, it is possible to prevent the occurrence of roll flaws and the like. The present invention is based on the above knowledge, and according to the present invention, the gap between the seal rolls in the vacuum sealing chamber connected to the vacuum deposition chamber can be reduced to a maximum of 0.5 depending on the thickness of the steel strip.
Provided is a sealing method for vacuum evaporation plating, which is characterized by sealing while keeping the size larger than mm. Further, as a preferred embodiment thereof, a sealing method is provided in which the joint portion of the steel strip is tracked in advance and the gap between the seal rolls is controlled based on the detected signal. Hereinafter, the present invention will be explained with reference to the drawings. Several types of continuous vacuum evaporation plating apparatus have been proposed, and the one illustrated in FIG. 1 has two evaporation chambers so that double-sided plating can be performed. The device includes a pretreatment furnace 2, a gas cooling chamber 3,
Pressurization chamber 4, first vacuum seal chamber 5, first vapor deposition chamber 6,
An intermediate vacuum seal chamber 7, a second vapor deposition chamber 8, a second vacuum seal chamber 9, and a cooling chamber 10 are provided in this order. The interior of each of the vacuum seal chambers 5, 7, and 9 is divided into multiple stages of vacuum chambers, and an exhaust system 11 is attached to each of these vacuum chambers and the vapor deposition chambers 6, 8, respectively.
The interior is maintained at a predetermined vacuum pressure. In each of the vacuum sealing chambers, a required number of seal rolls 12 are arranged sandwiching the steel strip 1 above and below, and the vertical interval of each seal roll 12 is set to be 0.5 mm larger than the thickness of the steel strip 1 at most. There is. When the roll interval is larger than the above-mentioned setting value, roll flaws and the like hardly occur on the surface of the steel strip, but the sealing effect is significantly reduced and it becomes difficult to maintain a predetermined vacuum pressure. In order to control the gap between the seal rolls, lifting devices such as jacks may be provided on the roll jocks at both ends of the rolls. In order to obtain a sealing effect, a weir plate can be used instead of a seal roll, but since it tends to cause scratches on the surface of the steel strip, a seal roll is generally used. The present invention provides a predetermined gap between the surface of the steel strip and the seal roll, and therefore, due to its essence, it can also be applied to the above-mentioned weir plate. Next, when steel strips of different thicknesses are to be continuously plated by vapor deposition, the welded joints of the steel strips may be tracked and the gap between the seal rolls may be adjusted in accordance with the detection signal. An example of this control is shown in FIG. As shown in the figure, information on the thickness of the steel strip is input in advance to the process control section, and tracking information on welding points is also input to the process control section. Tracking can be done using any known means.
For example, a method may be used in which a small hole is provided in the welded portion and a plurality of sensors installed in the transport direction are used to detect the small hole and grasp the progress of the welded portion. This information is transmitted to the roll position control section, and a control signal based on this information is transmitted to the drive motor 20.
A jack 21 is connected to the drive motor 20, and a roll chock 23 of the seal roll 22 is supported by the jack 21. The drive motor 20 is driven by a control signal, raises and lowers the jack 21, moves the roll chock 23 up and down, and moves the seal roll 2.
Adjust the gap in 2. The amount of displacement of the roll position is fed back to a roll position control section that is detected by a sensor. <Example> A galvanized steel sheet was manufactured using the continuous vacuum evaporation galvanizing apparatus shown in FIG. 1 under the following operating conditions. The results are shown in Table 1. Steel strip: plate thickness 0.8 mm, plate width 914 mm, carbon steel Line speed: 100 m/min Coating amount: 60 g/m 2 (both sides plated) 1st 2nd vapor deposition chamber Vacuum degree: 0.018 Torr 1st vacuum seal chamber: 6-stage vacuum chamber Vacuum degree of each chamber -760, 120, 54, 14, 2,
0.5Torr 2nd vacuum seal chamber: 7-stage vacuum chamber Vacuum degree of each chamber -0.5, 2, 14, 54, 120, 350,
760Torr As shown in Table 1, the sealing method of the present invention has fewer flaws on the surface of the steel strip, and the burden on the exhaust system for maintaining a predetermined vacuum pressure is not so great. When the roll gap is too large, no flaws are observed on the surface of the steel strip, but it is difficult to maintain a predetermined vacuum pressure.
【表】【table】
【表】
＜発明の効果＞
本発明のシール方法によれば、シールロールが
鋼帯表面に接触しないので鋼帯表面にロール疵等
を生じることがなく、高品質のメツキ鋼板を得る
ことができる。また蒸着室の真空度も高く維持さ
れ、真空排気系の負担も少ない。従つて真空蒸着
メツキのシール方法として最適である。[Table] <Effects of the Invention> According to the sealing method of the present invention, the seal roll does not come into contact with the surface of the steel strip, so roll flaws etc. do not occur on the surface of the steel strip, and a high-quality plated steel sheet can be obtained. . Furthermore, the degree of vacuum in the deposition chamber is maintained at a high level, reducing the burden on the vacuum evacuation system. Therefore, it is most suitable as a sealing method for vacuum evaporation plating.
第１図は本発明に係る連続真空蒸着亜鉛メツキ
装置の一例を示す概略図、第２図は本発明の制御
系の一例を示す説明図である。
図面中、１……鋼帯、２……前処理炉、３……
ガス冷却室、４……賦圧室、５……第１真空シー
ル室、６……第１蒸着室、７……中間シール室、
８……第２蒸着室、９……第２真空シール室、１
０……冷却室、１１……排気系、２０……駆動モ
ータ、２１……ジヤツキ、２２……シールロー
ル、２３……ロールチヨツク。
FIG. 1 is a schematic diagram showing an example of a continuous vacuum evaporation galvanizing apparatus according to the present invention, and FIG. 2 is an explanatory diagram showing an example of a control system of the present invention. In the drawings, 1... steel strip, 2... pretreatment furnace, 3...
Gas cooling chamber, 4... Pressurization chamber, 5... First vacuum sealing chamber, 6... First vapor deposition chamber, 7... Intermediate sealing chamber,
8...Second vapor deposition chamber, 9...Second vacuum seal chamber, 1
0... Cooling chamber, 11... Exhaust system, 20... Drive motor, 21... Jacket, 22... Seal roll, 23... Roll chock.
Claims (1)
ルロール間の間隙を鋼帯厚さより最大0.5mm大き
く保つてシールすることを特徴とする真空蒸着メ
ツキにおけるシール方法。 ２ 特許請求の範囲第１項の方法であつて、鋼帯
の接続部を予めトラツキングし、その検出信号に
基いてシールロールの間隙を制御するシール方
法。 ３ 蒸着後のシールロール間隙を鋼帯厚さより最
大0.5mm大きく保つてシールする特許請求の範囲
第１項のシール方法。[Claims] 1. A sealing method for vacuum evaporation plating, characterized in that the gap between seal rolls in a vacuum sealing chamber connected to a vacuum evaporation chamber is maintained at maximum 0.5 mm larger than the thickness of the steel strip. 2. A sealing method according to claim 1, which tracks the joint of the steel strip in advance and controls the gap between the seal rolls based on the detected signal. 3. The sealing method according to claim 1, in which the gap between the seal rolls after vapor deposition is kept at most 0.5 mm larger than the thickness of the steel strip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5943086A JPS62218565A (en) | 1986-03-19 | 1986-03-19 | Sealing method in vacuum deposition plating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5943086A JPS62218565A (en) | 1986-03-19 | 1986-03-19 | Sealing method in vacuum deposition plating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62218565A JPS62218565A (en) | 1987-09-25 |
| JPH0373636B2 true JPH0373636B2 (en) | 1991-11-22 |
Family
ID=13113042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5943086A Granted JPS62218565A (en) | 1986-03-19 | 1986-03-19 | Sealing method in vacuum deposition plating |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62218565A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101449520B1 (en) * | 2012-02-15 | 2014-10-13 | 히타치 어플라이언스 가부시키가이샤 | Refrigerator |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2532860Y2 (en) * | 1990-03-28 | 1997-04-16 | 三菱重工業株式会社 | Roll sealing device |
-
1986
- 1986-03-19 JP JP5943086A patent/JPS62218565A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101449520B1 (en) * | 2012-02-15 | 2014-10-13 | 히타치 어플라이언스 가부시키가이샤 | Refrigerator |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62218565A (en) | 1987-09-25 |
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