JPH0373449U - - Google Patents

Info

Publication number
JPH0373449U
JPH0373449U JP13523889U JP13523889U JPH0373449U JP H0373449 U JPH0373449 U JP H0373449U JP 13523889 U JP13523889 U JP 13523889U JP 13523889 U JP13523889 U JP 13523889U JP H0373449 U JPH0373449 U JP H0373449U
Authority
JP
Japan
Prior art keywords
suction ports
protruding
plate
suction
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13523889U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13523889U priority Critical patent/JPH0373449U/ja
Publication of JPH0373449U publication Critical patent/JPH0373449U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図ａ，ｂはそれぞれ本考案ウエーハ吸着プ
レートの一実施例を示す平面図及びその−線
断面図、第２図ａ，ｂはそれぞれ従来のウエーハ
吸着プレートの平面図及びその−線断面図、
第３図は従来例によるウエーハ裏面の吸引により
発生したパーテイクルを示す図である。 １，１ａ，１ｂ……プレート、２ａ，２ｂ……
突出吸引口、３……通路。 1A and 1B are a plan view and a cross-sectional view taken along the line 2, respectively, showing an embodiment of the wafer suction plate of the present invention, and FIGS. 2A and 2B are a plan view and a sectional view taken along the line 2 of the conventional wafer suction plate, respectively. ,
FIG. 3 is a diagram showing particles generated by suction on the back surface of a wafer in a conventional example. 1, 1a, 1b... plate, 2a, 2b...
Projecting suction port, 3...passage.

Claims (1)

【実用新案登録請求の範囲】 (1) 平面形状が一端より他端に向かつて徐々に
拡大するプレート１の表面に、複数個の突出吸引
口２ａ，２ｂ……を拡大方向にその数を増加させ
て設け、これらの突出吸引口２ａ，２ｂ……を通
路３で連通せしめてなるウエーハ吸着プレート。 (2) 複数個の突出吸引口２ａ，２ｂ……を３個
とし、これら２ａ〜２ｃを拡大方向に三角形配列
として設けてなる請求項第１項記載のウエーハ吸
着プレート。[Claims for Utility Model Registration] (1) A plurality of protruding suction ports 2a, 2b, etc. are provided on the surface of the plate 1 whose planar shape gradually expands from one end to the other, the number of which increases in the expanding direction. A wafer suction plate is provided in which these protruding suction ports 2a, 2b, . . . are connected through a passage 3. (2) The wafer suction plate according to claim 1, wherein the plurality of protruding suction ports 2a, 2b... are three, and these suction ports 2a to 2c are arranged in a triangular arrangement in the expanding direction.
JP13523889U 1989-11-20 1989-11-20 Pending JPH0373449U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13523889U JPH0373449U (en) 1989-11-20 1989-11-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13523889U JPH0373449U (en) 1989-11-20 1989-11-20

Publications (1)

Publication Number Publication Date
JPH0373449U true JPH0373449U (en) 1991-07-24

Family

ID=31682518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13523889U Pending JPH0373449U (en) 1989-11-20 1989-11-20

Country Status (1)

Country Link
JP (1) JPH0373449U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021038466A (en) * 2020-11-20 2021-03-11 株式会社荏原製作所 Substrate holder, carrier system carrying substrate in electronic device manufacturing installation and electronic device manufacturing installation

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59137368A (en) * 1983-01-25 1984-08-07 新日本製鐵株式会社 Refractories for repairment
JPS61156749A (en) * 1984-12-27 1986-07-16 Nec Corp Wafer flat plate type back side vacuum chuck
JPS61208234A (en) * 1985-03-13 1986-09-16 Matsushita Electronics Corp Vacuum chuck
JPS63127844A (en) * 1986-11-17 1988-05-31 Hitachi Ltd Vacuum adsorbing device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59137368A (en) * 1983-01-25 1984-08-07 新日本製鐵株式会社 Refractories for repairment
JPS61156749A (en) * 1984-12-27 1986-07-16 Nec Corp Wafer flat plate type back side vacuum chuck
JPS61208234A (en) * 1985-03-13 1986-09-16 Matsushita Electronics Corp Vacuum chuck
JPS63127844A (en) * 1986-11-17 1988-05-31 Hitachi Ltd Vacuum adsorbing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021038466A (en) * 2020-11-20 2021-03-11 株式会社荏原製作所 Substrate holder, carrier system carrying substrate in electronic device manufacturing installation and electronic device manufacturing installation

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