JPH0373436U - - Google Patents
Info
- Publication number
- JPH0373436U JPH0373436U JP13522489U JP13522489U JPH0373436U JP H0373436 U JPH0373436 U JP H0373436U JP 13522489 U JP13522489 U JP 13522489U JP 13522489 U JP13522489 U JP 13522489U JP H0373436 U JPH0373436 U JP H0373436U
- Authority
- JP
- Japan
- Prior art keywords
- positive pressure
- vacuum suction
- groove
- vacuum
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000004140 cleaning Methods 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13522489U JPH0373436U (hu) | 1989-11-21 | 1989-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13522489U JPH0373436U (hu) | 1989-11-21 | 1989-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0373436U true JPH0373436U (hu) | 1991-07-24 |
Family
ID=31682504
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13522489U Pending JPH0373436U (hu) | 1989-11-21 | 1989-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0373436U (hu) |
-
1989
- 1989-11-21 JP JP13522489U patent/JPH0373436U/ja active Pending