JPH0373432U - - Google Patents

Info

Publication number
JPH0373432U
JPH0373432U JP13383689U JP13383689U JPH0373432U JP H0373432 U JPH0373432 U JP H0373432U JP 13383689 U JP13383689 U JP 13383689U JP 13383689 U JP13383689 U JP 13383689U JP H0373432 U JPH0373432 U JP H0373432U
Authority
JP
Japan
Prior art keywords
cooling plate
electrode
support
tube bolt
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13383689U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13383689U priority Critical patent/JPH0373432U/ja
Publication of JPH0373432U publication Critical patent/JPH0373432U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP13383689U 1989-11-17 1989-11-17 Pending JPH0373432U (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13383689U JPH0373432U (US20030199744A1-20031023-C00003.png) 1989-11-17 1989-11-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13383689U JPH0373432U (US20030199744A1-20031023-C00003.png) 1989-11-17 1989-11-17

Publications (1)

Publication Number Publication Date
JPH0373432U true JPH0373432U (US20030199744A1-20031023-C00003.png) 1991-07-24

Family

ID=31681225

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13383689U Pending JPH0373432U (US20030199744A1-20031023-C00003.png) 1989-11-17 1989-11-17

Country Status (1)

Country Link
JP (1) JPH0373432U (US20030199744A1-20031023-C00003.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019135749A (ja) * 2018-02-05 2019-08-15 株式会社日立ハイテクノロジーズ プラズマ処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019135749A (ja) * 2018-02-05 2019-08-15 株式会社日立ハイテクノロジーズ プラズマ処理装置

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