JPH0373431U - - Google Patents
Info
- Publication number
- JPH0373431U JPH0373431U JP13511089U JP13511089U JPH0373431U JP H0373431 U JPH0373431 U JP H0373431U JP 13511089 U JP13511089 U JP 13511089U JP 13511089 U JP13511089 U JP 13511089U JP H0373431 U JPH0373431 U JP H0373431U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- ion implantation
- semiconductor substrate
- implantation device
- substrate support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 13
- 238000005468 ion implantation Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 claims description 2
- 239000012535 impurity Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13511089U JPH0373431U (xx) | 1989-11-21 | 1989-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13511089U JPH0373431U (xx) | 1989-11-21 | 1989-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0373431U true JPH0373431U (xx) | 1991-07-24 |
Family
ID=31682399
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13511089U Pending JPH0373431U (xx) | 1989-11-21 | 1989-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0373431U (xx) |
-
1989
- 1989-11-21 JP JP13511089U patent/JPH0373431U/ja active Pending