JPH0254154U - - Google Patents
Info
- Publication number
- JPH0254154U JPH0254154U JP13398388U JP13398388U JPH0254154U JP H0254154 U JPH0254154 U JP H0254154U JP 13398388 U JP13398388 U JP 13398388U JP 13398388 U JP13398388 U JP 13398388U JP H0254154 U JPH0254154 U JP H0254154U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- electrostatic chuck
- mounting table
- loading device
- ion implanter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims 2
- 239000004020 conductor Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13398388U JPH0254154U (xx) | 1988-10-13 | 1988-10-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13398388U JPH0254154U (xx) | 1988-10-13 | 1988-10-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0254154U true JPH0254154U (xx) | 1990-04-19 |
Family
ID=31392349
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13398388U Pending JPH0254154U (xx) | 1988-10-13 | 1988-10-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0254154U (xx) |
-
1988
- 1988-10-13 JP JP13398388U patent/JPH0254154U/ja active Pending