JPH0373007U - - Google Patents

Info

Publication number
JPH0373007U
JPH0373007U JP11746290U JP11746290U JPH0373007U JP H0373007 U JPH0373007 U JP H0373007U JP 11746290 U JP11746290 U JP 11746290U JP 11746290 U JP11746290 U JP 11746290U JP H0373007 U JPH0373007 U JP H0373007U
Authority
JP
Japan
Prior art keywords
waveguide
metal rod
microwave
opening
reactance element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11746290U
Other languages
English (en)
Other versions
JPH0749842Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990117462U priority Critical patent/JPH0749842Y2/ja
Publication of JPH0373007U publication Critical patent/JPH0373007U/ja
Application granted granted Critical
Publication of JPH0749842Y2 publication Critical patent/JPH0749842Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Waveguide Connection Structure (AREA)

Description

【図面の簡単な説明】
第１図は本考案による可変リアクタンス素子の
実施例を示す断面図、第２図は可変リアクタンス
素子の従来例を示す断面図、第３図はマイクロ波
プラズマ処理装置の一例を示す模式図、第４図は
円環状に成形した金属網の斜視図である。 図において、１……金属棒、２……開口部６を
有する導波管、３……支持部材、４……短絡面を
形成する弾性部材である。

Claims (1)

  1. 【実用新案登録請求の範囲】 導波管２に固定された支持部材３と、一端が該
    支持部材３に螺合し他端が前記導波管２に設けら
    れる開口部６を貫通して電界に平行に該導波管２
    内に挿入される金属棒１とを有し、該金属棒１の
    導波管２に対する挿入長の変化でマイクロ波を調
    整するマイクロ波可変リアクタンス素子であり、 前記導波管２の開口部６の近傍に、該導波管２
    に密着し且つ前記金属棒１の周囲と摺動するよう
    に配置された該金属棒１と導波管２との短絡を行
    う弾性部材４を備えてなることを特徴とするマイ
    クロ波可変リアクタンス素子。
JP1990117462U 1990-11-08 1990-11-08 マイクロ波可変リアクタンス素子 Expired - Lifetime JPH0749842Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990117462U JPH0749842Y2 (ja) 1990-11-08 1990-11-08 マイクロ波可変リアクタンス素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990117462U JPH0749842Y2 (ja) 1990-11-08 1990-11-08 マイクロ波可変リアクタンス素子

Publications (2)

Publication Number Publication Date
JPH0373007U true JPH0373007U (ja) 1991-07-23
JPH0749842Y2 JPH0749842Y2 (ja) 1995-11-13

Family

ID=31665677

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990117462U Expired - Lifetime JPH0749842Y2 (ja) 1990-11-08 1990-11-08 マイクロ波可変リアクタンス素子

Country Status (1)

Country Link
JP (1) JPH0749842Y2 (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4735837U (ja) * 1971-05-14 1972-12-21
JPS52133156U (ja) * 1976-04-05 1977-10-08
JPS5618001U (ja) * 1979-07-23 1981-02-17

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4735837U (ja) * 1971-05-14 1972-12-21
JPS52133156U (ja) * 1976-04-05 1977-10-08
JPS5618001U (ja) * 1979-07-23 1981-02-17

Also Published As

Publication number Publication date
JPH0749842Y2 (ja) 1995-11-13

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