JPH0371626U - - Google Patents

Info

Publication number
JPH0371626U
JPH0371626U JP13332089U JP13332089U JPH0371626U JP H0371626 U JPH0371626 U JP H0371626U JP 13332089 U JP13332089 U JP 13332089U JP 13332089 U JP13332089 U JP 13332089U JP H0371626 U JPH0371626 U JP H0371626U
Authority
JP
Japan
Prior art keywords
integrated circuit
circuit board
holder
recess
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13332089U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13332089U priority Critical patent/JPH0371626U/ja
Publication of JPH0371626U publication Critical patent/JPH0371626U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP13332089U 1989-11-16 1989-11-16 Pending JPH0371626U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13332089U JPH0371626U (enExample) 1989-11-16 1989-11-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13332089U JPH0371626U (enExample) 1989-11-16 1989-11-16

Publications (1)

Publication Number Publication Date
JPH0371626U true JPH0371626U (enExample) 1991-07-19

Family

ID=31680729

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13332089U Pending JPH0371626U (enExample) 1989-11-16 1989-11-16

Country Status (1)

Country Link
JP (1) JPH0371626U (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007113847A (ja) * 2005-10-20 2007-05-10 Altopia:Kk 床下または天井裏の撹拌送風機能付き排気装置
JP2009200241A (ja) * 2008-02-21 2009-09-03 Ulvac Japan Ltd 基板保持装置、基板ホルダ、真空処理装置、基板の温度制御方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007113847A (ja) * 2005-10-20 2007-05-10 Altopia:Kk 床下または天井裏の撹拌送風機能付き排気装置
JP2009200241A (ja) * 2008-02-21 2009-09-03 Ulvac Japan Ltd 基板保持装置、基板ホルダ、真空処理装置、基板の温度制御方法

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