JPH0371621U - - Google Patents
Info
- Publication number
- JPH0371621U JPH0371621U JP13209989U JP13209989U JPH0371621U JP H0371621 U JPH0371621 U JP H0371621U JP 13209989 U JP13209989 U JP 13209989U JP 13209989 U JP13209989 U JP 13209989U JP H0371621 U JPH0371621 U JP H0371621U
- Authority
- JP
- Japan
- Prior art keywords
- reticle
- section
- pellicle
- measuring
- jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13209989U JPH0371621U (sv) | 1989-11-15 | 1989-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13209989U JPH0371621U (sv) | 1989-11-15 | 1989-11-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0371621U true JPH0371621U (sv) | 1991-07-19 |
Family
ID=31679572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13209989U Pending JPH0371621U (sv) | 1989-11-15 | 1989-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0371621U (sv) |
-
1989
- 1989-11-15 JP JP13209989U patent/JPH0371621U/ja active Pending