JPH0371419A - Carbonaceous solid lubricating film structure on surface of magnetic recording medium and film formation thereof - Google Patents
Carbonaceous solid lubricating film structure on surface of magnetic recording medium and film formation thereofInfo
- Publication number
- JPH0371419A JPH0371419A JP20893089A JP20893089A JPH0371419A JP H0371419 A JPH0371419 A JP H0371419A JP 20893089 A JP20893089 A JP 20893089A JP 20893089 A JP20893089 A JP 20893089A JP H0371419 A JPH0371419 A JP H0371419A
- Authority
- JP
- Japan
- Prior art keywords
- film
- diamond
- carbon film
- sputtering
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007787 solid Substances 0.000 title claims abstract description 14
- 230000015572 biosynthetic process Effects 0.000 title abstract description 8
- 230000001050 lubricating effect Effects 0.000 title abstract description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 55
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 50
- 238000004544 sputter deposition Methods 0.000 claims abstract description 34
- 229910003481 amorphous carbon Inorganic materials 0.000 claims abstract description 16
- 238000000034 method Methods 0.000 claims abstract description 11
- 239000007789 gas Substances 0.000 claims description 19
- 239000000314 lubricant Substances 0.000 claims description 14
- 229910002804 graphite Inorganic materials 0.000 claims description 6
- 239000010439 graphite Substances 0.000 claims description 6
- 238000002294 plasma sputter deposition Methods 0.000 claims description 5
- 239000004215 Carbon black (E152) Substances 0.000 claims description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 4
- 229930195733 hydrocarbon Natural products 0.000 claims description 4
- 150000002430 hydrocarbons Chemical class 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- 239000001257 hydrogen Substances 0.000 claims 1
- 230000001681 protective effect Effects 0.000 abstract description 6
- 238000000151 deposition Methods 0.000 abstract description 2
- 230000008021 deposition Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 description 101
- 239000010409 thin film Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910002441 CoNi Inorganic materials 0.000 description 1
- 229910018104 Ni-P Inorganic materials 0.000 description 1
- 229910018536 Ni—P Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000005001 laminate film Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、金属薄膜型磁気記録媒体の磁性膜を被覆保護
する炭素質固体潤滑膜構造およびその成膜方法に関する
。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a carbonaceous solid lubricant film structure for covering and protecting a magnetic film of a metal thin film type magnetic recording medium and a method for forming the film.
非磁性基体にＣｏ系、Ｃｏ−Ｃｒ系、Ｇｏ−〇ｒ−Ｎｉ
系等の磁性膜が記録層として形成された金Ｓ薄膜型磁気
記録媒体の該磁性膜を、記録・再生操作時における磁気
ヘッドとの接触による摩耗・損傷から保護し、磁気ヘッ
ドとの接触を滑らかにするための保護・潤滑膜として、
磁性膜面にアイカーボン（ｉ−Ｃ） と称されるダイ
ヤモンド・ライク・カーボン膜を形成することが行われ
ている。そのカーボン膜は、ダイヤモンドに近い物性を
有する膜体であり、磁性層の保護潤滑膜として望まれる
すぐれた耐摩耗性と潤滑特性とを兼ね備えている。Co-based, Co-Cr-based, Go-〇r-Ni as a non-magnetic substrate
This method protects the magnetic film of a gold-S thin film type magnetic recording medium, in which a magnetic film such as a magnetic film is formed as a recording layer, from wear and damage caused by contact with a magnetic head during recording and reproducing operations, and prevents contact with the magnetic head. As a protective and lubricating film for smoothness,
A diamond-like carbon film called i-carbon (i-C) is formed on the magnetic film surface. The carbon film has physical properties close to those of diamond, and has both excellent wear resistance and lubricating properties desired as a protective lubricant film for the magnetic layer.
上記ダイヤモンド・ライク・カーボン膜は、プラズマス
パッタリングにおいて、スパッタ室内をＡｒガスと適量
の炭化水素ガスもしくは水素ガスとの混合ガスからなる
減圧雰囲気とし、黒鉛をターゲットとするスパッタリン
グを行うことにより成膜される。The above-mentioned diamond-like carbon film is formed by sputtering using graphite as a target in a sputtering chamber with a reduced pressure atmosphere consisting of a mixed gas of Ar gas and an appropriate amount of hydrocarbon gas or hydrogen gas in plasma sputtering. Ru.
上記ダイヤモンド・ライク・カーボン膜は、磁性膜の保
護潤滑膜としてすぐれた機能を有する膜体であるが、そ
の膜表面には多数の突起が観察される。その膜面の突起
は、スパッタリングによる成膜過程で、スパッタ室の内
壁面から剥落する炭素フレークが、成膜途中のダイヤモ
ンド・ライク・カーボン膜面に落下付着することに起因
して発生する。すなわち、スパッタ室内においてターゲ
ットからスパッタ蒸発し、成膜対象（磁気記録媒体）の
磁性膜面に向って飛翔する炭素粒子の一部は、スパッタ
室の内壁面や、ターゲットと成膜対象との間の空間に配
置されているシールド部材の表面に衝突してその表面に
膜状に沈積し、またその炭素沈積層の表面からフレーク
状に炭素が剥落する現象を生じる。ダイヤモンド・ライ
ク・カーボンの成膜スパッタリングにおいては特にその
炭素フレークの剥落を生じ易く、従って成膜されたダイ
ヤモンド・ライク・カーボン膜は不可避的に多数の膜面
突起を付随することとなり、表面の平坦性に劣る。The diamond-like carbon film described above is a film body that has an excellent function as a protective lubricant film for a magnetic film, but many protrusions are observed on the film surface. The protrusions on the film surface are caused by carbon flakes that peel off from the inner wall surface of the sputtering chamber during the film formation process by sputtering and fall and adhere to the surface of the diamond-like carbon film that is being formed. In other words, some of the carbon particles that sputter evaporate from the target in the sputtering chamber and fly toward the magnetic film surface of the film-forming target (magnetic recording medium) are on the inner wall of the sputtering chamber or between the target and the film-forming target. The carbon collides with the surface of the shield member disposed in the space, and is deposited on the surface in the form of a film, and carbon flakes are peeled off from the surface of the carbon deposited layer. When sputtering diamond-like carbon films, the carbon flakes are particularly prone to peeling off, and therefore, the formed diamond-like carbon film inevitably has many film surface protrusions, resulting in a flat surface. inferior to sex.
このため、上記スパッタリング成膜の後、その表面凹凸
の修正を目的として、膜面に近接浮上させた磁気ヘッド
を回転摺接させ表面突起を除去すルハーニッシュ工程で
のバーニッシュヒツト数（磁気ヘッドと表面突起の衝突
頻度）が大きく、また磁気ヘッドの衝突により突起が除
去される際に、その近傍の膜面に損傷を生じることがあ
る。For this reason, after the sputtering film is formed, the number of burnish hits (the number of burnish hits between the magnetic head and The collision frequency of the surface protrusions is high, and when the protrusions are removed due to collisions with the magnetic head, damage may occur to the film surface in the vicinity of the protrusions.
本発明は、上記問題点を解決するためになされたもので
あり、表面の平坦性にすくれた炭素質固体潤滑膜構造お
よびその成膜方法を提供する。The present invention has been made to solve the above-mentioned problems, and provides a carbonaceous solid lubricant film structure with reduced surface flatness and a method for forming the same.
〔課題を解決するための手段および作用〕本発明に係る
磁気記録媒体の磁性膜を被覆保護する炭素質固体潤滑膜
は、ダイヤモンド・ライク・カーボン膜と、そのダイヤ
モンド・ライク・カーボン膜を被覆するアモルファスカ
ーボン膜との積層構造を有することを特徴としている。[Means and effects for solving the problem] The carbonaceous solid lubricant film that coats and protects the magnetic film of the magnetic recording medium according to the present invention includes a diamond-like carbon film and a diamond-like carbon film that covers the diamond-like carbon film. It is characterized by having a laminated structure with an amorphous carbon film.
本発明の上記炭素質固体潤滑膜は、黒鉛をターゲットと
するプラズマスパッタリングにおいて、まずスパッタ雰
囲気をＡｒガスと炭化水素ガスもしくは水素ガスとから
なる混合ガスの減圧雰囲気としてスパッタリングを行い
、ついでそのスパッタ雰囲気をＡｒガスの減圧雰囲気に
代えてスパッタリングを行う２段スパッタにより形成す
ることができる。The above-mentioned carbonaceous solid lubricant film of the present invention can be obtained by performing sputtering in plasma sputtering using graphite as a target, first by setting the sputtering atmosphere to a reduced pressure atmosphere of a mixed gas consisting of Ar gas and hydrocarbon gas or hydrogen gas, and then sputtering in the sputtering atmosphere. It can be formed by two-stage sputtering in which sputtering is performed in place of a reduced pressure atmosphere of Ar gas.
本発明において、磁性膜面上にダイヤモンド・ライク・
カーボン膜を形成する第１段のプラズマスパッタリング
は、常法により、そのスパッタ雰囲気を、Ａｒガスと約
５〜５０容量％の炭化水素ガスもしくは水素ガスとの混
合ガスの減圧雰囲気（約ＩＸ １０−３〜５ Ｘ １０
− ”Ｔｏｒｒ）とし、グロー放電下、黒鉛ターゲット
のスパッタ蒸発粒子を成膜対象（磁気記録媒体）の磁性
膜面に衝突沈積させることにより行われる。そのスパッ
タリング成膜につづき、アモルファスカーボン膜を形成
する第２段のスパッタリングは、スパッタ雰囲気を、前
記混合ガス雰囲気に代えてＡｒ単味の減圧雰囲気（約ｌ
Ｘｌ０−’〜５ Ｘ １０− ”Ｔｏｒｒ）として黒鉛
ターゲットのスパッタ蒸発を行うことにより達成される
。そのＡｒ単味の減圧雰囲気下で行われるスパッタリン
グ過程においては、前記ダイヤモンド、ライク・カーボ
ン膜のスパッタリングと異なって、スパッタ室内の炭素
フレークの発生は著しく少なく、従ってそのスパッタリ
ングにより形成されるアモルファスカーボン膜には、ダ
イヤモンド・ライク・カーボン膜のような多数の表面突
起はなく、その膜面ば平坦性を有している。上記第１段
および第２段の各プラズマスパッタリング成膜における
スパッタ方式は任意であり、例えば直情、スパッタ、高
周波スパッタ、あるいはマグネトロンスパッタ等により
行えばよい。In the present invention, a diamond-like film is formed on the magnetic film surface.
In the first stage of plasma sputtering to form a carbon film, the sputtering atmosphere is changed to a reduced pressure atmosphere of a mixed gas of Ar gas and approximately 5 to 50% by volume of hydrocarbon gas or hydrogen gas (approximately 3~5 x 10
− ” Torr), and colliding and depositing sputtered particles of a graphite target on the magnetic film surface of the film-forming target (magnetic recording medium) under glow discharge.Following the sputtering film-forming, an amorphous carbon film is formed. In the second stage sputtering, the sputtering atmosphere is changed to a reduced pressure atmosphere (about l
This is achieved by performing sputter evaporation of a graphite target at a temperature of Unlike a diamond-like carbon film, the generation of carbon flakes in the sputtering chamber is extremely small, and the amorphous carbon film formed by sputtering does not have many surface protrusions like a diamond-like carbon film, and its surface is flat. The sputtering method in each of the first and second stages of plasma sputtering film formation is arbitrary, and may be performed by, for example, direct sputtering, sputtering, high frequency sputtering, or magnetron sputtering.
第１図は」二記２段スパッタリングにより形成される本
発明の炭素質固体潤滑膜の積層構造を模式的に示してい
る。 （１）は磁性膜であり、（２）は磁性膜面上に第
１層として形成されたダイヤモンド・ライク・カーボン
膜、（３）は上記ダイヤモンド・ライク・カーボン膜（
２）の膜面に第２層として積層形成されたアモルファス
カーボン膜である。FIG. 1 schematically shows the laminated structure of the carbonaceous solid lubricant film of the present invention formed by two-stage sputtering. (1) is a magnetic film, (2) is a diamond-like carbon film formed as the first layer on the magnetic film surface, and (3) is the diamond-like carbon film (
This is an amorphous carbon film laminated as a second layer on the film surface of 2).
ダイヤモンド・ライク・カーボン膜（２）は、前述のよ
うにそのスパッタリング成膜過程における炭素フレーク
の落下付着に起因して生じた多数の突起を有し著しい表
面凹凸を呈しているが、アモルファスカーボン膜（３）
は、下層のダイヤモンド・ライク・カーボン膜（２）の
表面凹凸を埋め、突起の少ない膜表面をなしてダイヤモ
ンド・ライク・カーボン膜（２）を被覆している。As mentioned above, the diamond-like carbon film (2) has a large number of protrusions caused by falling and adhering carbon flakes during the sputtering film formation process, and has a significant surface unevenness. (3)
fills in the surface irregularities of the underlying diamond-like carbon film (2) and forms a film surface with few protrusions to cover the diamond-like carbon film (2).
上記ダイヤモンド・ライク・カーボン膜（２）とアモル
ファスカーボン膜（３）とからなる炭素質積層膜体（４
）の磁性層保護膜として必要な膜厚は、対象とする磁気
記録媒体の種類や、記杯再生床作の厭弐等にもよるが、
あまり薄いと、従来のスパッタリング成膜と同様、膜面
全体の均質性の確保が困難となるので、約１００Å以上
とするがよい。また、その膜厚は約５００Ａ程度までの
厚さで十分である。なお、その積層膜体（４）における
ダイヤモンド・ライク・カーボン膜（２）とアモルファ
スカーボン膜（３）との膜厚の比は、例えばその全厚の
約６０〜８０％をダイヤモンド・ライク・カーボン膜（
２）とし、残余の膜厚をアモルファスカーボン膜（３）
とすることができる。Carbonaceous laminate film body (4) consisting of the above-mentioned diamond-like carbon film (2) and amorphous carbon film (3)
) The required film thickness for the magnetic layer protective film depends on the type of magnetic recording medium to be used and the preference of the record reproduction bed.
If it is too thin, it becomes difficult to ensure uniformity over the entire film surface, as in conventional sputtering film formation, so the thickness is preferably about 100 Å or more. Further, a film thickness of up to about 500A is sufficient. The film thickness ratio between the diamond-like carbon film (2) and the amorphous carbon film (3) in the laminated film body (4) is such that, for example, about 60 to 80% of the total thickness is made of diamond-like carbon. film(
2), and the remaining film thickness is an amorphous carbon film (3).
It can be done.
本発明の対象とする磁気記録媒体は、磁気ディスクをは
じめ、各種磁気ドラム、磁気テープ、磁気シート等が包
含される。また、その磁性膜面にダイヤモンド・ライク
・カーボン膜とアモルファスカーボン膜とを積層成膜し
たのち、所望により、磁気ヘッドの摩擦に対する潤滑性
を向上させる目的で、その炭素質膜面上に、潤滑剤（例
えば、モンテジソン社製’ＡＭ２００ｂ等）の薄膜（例
えば１Ｏ−１０ＯＡ）が塗布される。Magnetic recording media targeted by the present invention include magnetic disks, various magnetic drums, magnetic tapes, magnetic sheets, and the like. In addition, after a diamond-like carbon film and an amorphous carbon film are laminated on the magnetic film surface, if desired, lubrication is applied on the carbon film surface in order to improve the lubricity against friction of the magnetic head. A thin film (e.g. 10-100A) of an agent (e.g. 'AM200b' from Montegisson etc.) is applied.
ｆ１ｉ１社股面そ灰１（貫股−Ｃ被濱しＩこ短気丁イス
グ（５，２５＃型）を製作し、グライドテストにより、
炭素膜の表面性状を評価（７た。f1i1 company produced a short-cut isug (5, 25 # type), and by glide test,
The surface properties of the carbon film were evaluated (7).
ＣＩ）供試磁気ディスクの製作
アルミニウム合金基板の表面に、 Ｎ ｉ−Ｐ無電解め
っき膜（膜厚２０μｍ）を形威し、表面をポリッシュし
た後、テキスチャ処理し、ついで直流マグネトロンスパ
ッタリング（雰囲気： ０．７ Ｘ １０”’ ”Ｔｏ
ｒｒＡｒ）により、下地層としてＣｒ膜（膜厚： １５
００人）および記録層としてＣｏＮｉ系磁性膜（膜厚：
７００人）をこの順に形成した。CI) Production of test magnetic disk A Ni-P electroless plating film (film thickness 20 μm) is formed on the surface of an aluminum alloy substrate, the surface is polished, textured, and then DC magnetron sputtering (atmosphere: 0.7
rrAr), a Cr film (film thickness: 15
00 people) and a CoNi-based magnetic film (thickness:
700 people) were formed in this order.
ついで、そのスパッタ室において、黒鉛をターゲットと
し、まずＡｒガスとメタンガスＣ７：３゜容量比）の混
合ガス雰囲気（Ｉ Ｘ １０””Ｔｏｒｒ）でダイヤモ
ンド・ライク・カーボン膜を形成する第１段のスパッタ
リングと、その雰囲気をＡｒガス雰囲気（Ｉ Ｘｌ０−
”Ｔｏｒｒ）に代えてアモルファスカーボン膜を形成す
る第２段のスパッタリングを行って供試磁気ディスク穴
（Ｎ＝１０）を得た。なお、ダイヤモンド・ライク・
カーボン膜の膜厚は約２５０人とし、アモルファスカー
ボン膜のそれは約１５０人（総膜厚：約４００人）とし
た。Next, in the sputtering chamber, a first stage process was carried out in which a diamond-like carbon film was formed using graphite as a target in a mixed gas atmosphere (I x 10'' Torr) of Ar gas and methane gas (volume ratio: 7:3°). Sputtering and the atmosphere was changed to an Ar gas atmosphere (I Xl0-
The test magnetic disk holes (N=10) were obtained by performing a second sputtering process to form an amorphous carbon film in place of the diamond-like carbon film.
The thickness of the carbon film was about 250, and the thickness of the amorphous carbon film was about 150 (total thickness: about 400).
比較例として、第２段のスパッタリング（アモルファス
カーボン膜の形成）を省略した点を除いて上記と全く同
一の条件により、磁性膜面をダイヤモンド・ライク・カ
ーボン膜（但し、膜厚：約４００Å）で被覆した供試磁
気ディスクＢ （Ｎ＝１０）を製作した。As a comparative example, the magnetic film surface was coated with a diamond-like carbon film (film thickness: approximately 400 Å) under the same conditions as above except that the second stage of sputtering (formation of the amorphous carbon film) was omitted. A test magnetic disk B (N=10) coated with
〔■〕グライドテスト
上記各供試磁気ディスク穴およびＢ（各１０枚）につい
て、その炭素質膜面上に、バーニッシュヘッドを近接浮
上（浮上量：０．１５μｍ）させ回転下に生じるバーニ
ッシヱヒット数をカウントして下記の結果を得た。[■] Glide test For each of the test magnetic disk holes and B (10 disks each), a burnish head was flown close to the surface of the carbonaceous film (flying height: 0.15 μm) to measure the burnishing that occurs during rotation. The number of hits was counted and the following results were obtained.
第 １ 表
供試磁気ディスク ヒツト数（平均）発明例Ａ５
比較例Ｂ ２０
〔発明の効果〕
本発明の炭素質固体潤滑膜は従来のそれと異なって、表
面突起が少なく、従って成膜後のバーニッシュ工程にお
いて、磁気ヘッドの衝突時の突起の欠けに伴う膜面の損
傷が少なくなり、磁気記録媒体の製造歩留が向上する。Table 1 Number of test magnetic disk hits (average) Invention example A5 Comparative example B 20 [Effects of the invention] Unlike conventional ones, the carbonaceous solid lubricant film of the present invention has fewer surface protrusions, and therefore the bar after film formation is In the nishing process, damage to the film surface due to chipping of protrusions when a magnetic head collides is reduced, and the manufacturing yield of magnetic recording media is improved.
また、表面突起の減少に伴い、炭素質膜体の均質性・緻
密性も改善され、保護潤滑膜とし、ての安定性・耐久性
が向上する。In addition, with the reduction of surface protrusions, the homogeneity and density of the carbonaceous film are improved, and the stability and durability of the carbonaceous film as a protective lubricant film are improved.
第１図は本発明の磁性膜面上の炭素質固体潤滑膜の積層
構造を模式的に示す断面図である。
１：磁性膜、２：ダイヤモンド・ライク・カーボン膜、
３ニアモルフアスカーボン膜。FIG. 1 is a cross-sectional view schematically showing a laminated structure of a carbonaceous solid lubricant film on a magnetic film surface according to the present invention. 1: Magnetic film, 2: Diamond-like carbon film,
3Niamorphous carbon film.
Claims (1)
ド・ライク・カーボン膜と、そのダイヤモンド・ライク
・カーボン膜を被覆するアモルファスカーボン膜とが積
層形成されていることを特徴とする磁気記録媒体表面の
炭素質固体潤滑膜構造。 ２、非磁性基体上の金属系磁性膜の表面に、黒鉛をター
ゲットとするプラズマスパッタングにより、炭素質固体
潤滑膜を形成する方法において、Ａｒガスに５〜５０容
量％の炭化水素ガスもしくは水素ガスが添加された混合
ガス雰囲気でのスパッタリングにより磁性膜面上にダイ
ヤモンド・ライク・カーボン膜を形成し、ついでＡｒガ
ス雰囲気でのスパッタリングにより、アモルファスカー
ボン膜を前記ダイヤモンド・ライク・カーボン膜面上に
積層形成することを特徴とする炭素質固体潤滑膜の形成
方法。[Claims] 1. A diamond-like carbon film and an amorphous carbon film covering the diamond-like carbon film are layered on the surface of a metal-based magnetic film on a non-magnetic substrate. A carbonaceous solid lubricant film structure on the surface of a magnetic recording medium characterized by: 2. In a method of forming a carbonaceous solid lubricant film on the surface of a metal-based magnetic film on a non-magnetic substrate by plasma sputtering using graphite as a target, 5 to 50% by volume of hydrocarbon gas or hydrogen is added to Ar gas. A diamond-like carbon film is formed on the magnetic film surface by sputtering in a mixed gas atmosphere to which gas is added, and then an amorphous carbon film is formed on the diamond-like carbon film surface by sputtering in an Ar gas atmosphere. A method for forming a carbonaceous solid lubricant film, characterized by forming a carbonaceous solid lubricant film in layers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1208930A JP2544206B2 (en) | 1989-08-11 | 1989-08-11 | Method for forming carbonaceous solid lubricating film on magnetic recording medium surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1208930A JP2544206B2 (en) | 1989-08-11 | 1989-08-11 | Method for forming carbonaceous solid lubricating film on magnetic recording medium surface |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0371419A true JPH0371419A (en) | 1991-03-27 |
| JP2544206B2 JP2544206B2 (en) | 1996-10-16 |
Family
ID=16564482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1208930A Expired - Fee Related JP2544206B2 (en) | 1989-08-11 | 1989-08-11 | Method for forming carbonaceous solid lubricating film on magnetic recording medium surface |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2544206B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0644556A (en) * | 1992-03-25 | 1994-02-18 | Nec Corp | Magnetic storage medium |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59213030A (en) * | 1983-05-17 | 1984-12-01 | Denki Kagaku Kogyo Kk | Magnetic recording medium and its manufacture |
| JPH02143912A (en) * | 1988-11-25 | 1990-06-01 | Nec Corp | Magnetic recording medium |
-
1989
- 1989-08-11 JP JP1208930A patent/JP2544206B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59213030A (en) * | 1983-05-17 | 1984-12-01 | Denki Kagaku Kogyo Kk | Magnetic recording medium and its manufacture |
| JPH02143912A (en) * | 1988-11-25 | 1990-06-01 | Nec Corp | Magnetic recording medium |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0644556A (en) * | 1992-03-25 | 1994-02-18 | Nec Corp | Magnetic storage medium |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2544206B2 (en) | 1996-10-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6682807B2 (en) | Magnetic disk comprising a first carbon overcoat having a high SP3 content and a second carbon overcoat having a low SP3 content | |
| US5567512A (en) | Thin carbon overcoat and method of its making | |
| US5858182A (en) | Bilayer carbon overcoating for magnetic data storage disks and magnetic head/slider constructions | |
| JPS63311626A (en) | Manufacture of magnetic recording disc | |
| US6103367A (en) | Coating of metal substrate for magnetic recording medium | |
| JP2010027197A (en) | Oxidized conformal capping layer | |
| JPH0613237A (en) | Magnetic recording medium and method for increasing rate of coercive force thereof | |
| JPH0371419A (en) | Carbonaceous solid lubricating film structure on surface of magnetic recording medium and film formation thereof | |
| US6242086B1 (en) | High coercivity, low noise magnetic recording medium comprising an intermediate cocrtaox layer | |
| US5223304A (en) | Process for fabricating magnetic disks | |
| JPH05225556A (en) | Magnetic recording disk provided with improved protective film | |
| JPH0465445B2 (en) | ||
| JPH0223522A (en) | Production of magnetic recording medium | |
| JPH0262888B2 (en) | ||
| JPH05174369A (en) | Magnetic recording medium | |
| JPH05314468A (en) | Magnetic recording medium and manufacture of the same | |
| JPH0371425A (en) | Method for forming carbon film on surface of magnetic recording medium | |
| JPH07262547A (en) | Magnetic recording medium and its production | |
| JPS62252518A (en) | Magnetic recording medium and its production | |
| JPH05174368A (en) | Magnetic recording medium | |
| JPH01232518A (en) | Formation of carbonaceous film on surface of magnetic recording medium | |
| JPS62219323A (en) | Magnetic recording medium and its production | |
| JPH0793738A (en) | Magnetic recording medium | |
| JPH08147662A (en) | Magnetic recording medium | |
| JPH0770050B2 (en) | Magnetic recording medium |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |