JPH0370764B2 - - Google Patents

Info

Publication number
JPH0370764B2
JPH0370764B2 JP1714781A JP1714781A JPH0370764B2 JP H0370764 B2 JPH0370764 B2 JP H0370764B2 JP 1714781 A JP1714781 A JP 1714781A JP 1714781 A JP1714781 A JP 1714781A JP H0370764 B2 JPH0370764 B2 JP H0370764B2
Authority
JP
Japan
Prior art keywords
film
optical fibers
spectrometer
measured
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1714781A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57131007A (en
Inventor
Masahito Koike
Kunihiko Ookubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1714781A priority Critical patent/JPS57131007A/ja
Publication of JPS57131007A publication Critical patent/JPS57131007A/ja
Publication of JPH0370764B2 publication Critical patent/JPH0370764B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP1714781A 1981-02-06 1981-02-06 Film thickness gauge Granted JPS57131007A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1714781A JPS57131007A (en) 1981-02-06 1981-02-06 Film thickness gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1714781A JPS57131007A (en) 1981-02-06 1981-02-06 Film thickness gauge

Publications (2)

Publication Number Publication Date
JPS57131007A JPS57131007A (en) 1982-08-13
JPH0370764B2 true JPH0370764B2 (enrdf_load_stackoverflow) 1991-11-08

Family

ID=11935875

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1714781A Granted JPS57131007A (en) 1981-02-06 1981-02-06 Film thickness gauge

Country Status (1)

Country Link
JP (1) JPS57131007A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3406645A1 (de) * 1984-02-24 1985-08-29 Leybold-Heraeus GmbH, 5000 Köln Spektralfotometeranordnung
JPS622104A (ja) * 1985-06-28 1987-01-08 Oak Seisakusho:Kk 膜厚測定装置
KR100409090B1 (ko) * 2000-11-27 2003-12-11 케이맥(주) 미세패턴 박막두께 측정장치.
JP2006030070A (ja) * 2004-07-20 2006-02-02 Opto One Kk 膜厚検査装置
JP2006058056A (ja) * 2004-08-18 2006-03-02 Opto One Kk 分光膜厚測定装置

Also Published As

Publication number Publication date
JPS57131007A (en) 1982-08-13

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