JPH0369757U - - Google Patents

Info

Publication number
JPH0369757U
JPH0369757U JP13215689U JP13215689U JPH0369757U JP H0369757 U JPH0369757 U JP H0369757U JP 13215689 U JP13215689 U JP 13215689U JP 13215689 U JP13215689 U JP 13215689U JP H0369757 U JPH0369757 U JP H0369757U
Authority
JP
Japan
Prior art keywords
arm
vacuum container
lid
tiltable
apply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13215689U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13215689U priority Critical patent/JPH0369757U/ja
Publication of JPH0369757U publication Critical patent/JPH0369757U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packages (AREA)
  • Closures For Containers (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
JP13215689U 1989-11-14 1989-11-14 Pending JPH0369757U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13215689U JPH0369757U (fr) 1989-11-14 1989-11-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13215689U JPH0369757U (fr) 1989-11-14 1989-11-14

Publications (1)

Publication Number Publication Date
JPH0369757U true JPH0369757U (fr) 1991-07-11

Family

ID=31679627

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13215689U Pending JPH0369757U (fr) 1989-11-14 1989-11-14

Country Status (1)

Country Link
JP (1) JPH0369757U (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004055419A1 (fr) * 2002-12-17 2004-07-01 Tokyo Electron Limited Corps de couvercle et dispositif avec chambre a vide
KR101149481B1 (ko) * 2003-03-11 2012-05-24 티에스 코포레이션 가부시키가이샤 커버 작동장치

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004055419A1 (fr) * 2002-12-17 2004-07-01 Tokyo Electron Limited Corps de couvercle et dispositif avec chambre a vide
JP2004200257A (ja) * 2002-12-17 2004-07-15 Tokyo Electron Ltd 開閉機構及び真空容器
JP4559700B2 (ja) * 2002-12-17 2010-10-13 東京エレクトロン株式会社 真空容器
KR101149481B1 (ko) * 2003-03-11 2012-05-24 티에스 코포레이션 가부시키가이샤 커버 작동장치

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