JPH0369757U - - Google Patents
Info
- Publication number
- JPH0369757U JPH0369757U JP13215689U JP13215689U JPH0369757U JP H0369757 U JPH0369757 U JP H0369757U JP 13215689 U JP13215689 U JP 13215689U JP 13215689 U JP13215689 U JP 13215689U JP H0369757 U JPH0369757 U JP H0369757U
- Authority
- JP
- Japan
- Prior art keywords
- arm
- vacuum container
- lid
- tiltable
- apply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Packages (AREA)
- Closures For Containers (AREA)
- Pressure Vessels And Lids Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13215689U JPH0369757U (fr) | 1989-11-14 | 1989-11-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13215689U JPH0369757U (fr) | 1989-11-14 | 1989-11-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0369757U true JPH0369757U (fr) | 1991-07-11 |
Family
ID=31679627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13215689U Pending JPH0369757U (fr) | 1989-11-14 | 1989-11-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0369757U (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004055419A1 (fr) * | 2002-12-17 | 2004-07-01 | Tokyo Electron Limited | Corps de couvercle et dispositif avec chambre a vide |
| KR101149481B1 (ko) * | 2003-03-11 | 2012-05-24 | 티에스 코포레이션 가부시키가이샤 | 커버 작동장치 |
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1989
- 1989-11-14 JP JP13215689U patent/JPH0369757U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004055419A1 (fr) * | 2002-12-17 | 2004-07-01 | Tokyo Electron Limited | Corps de couvercle et dispositif avec chambre a vide |
| JP2004200257A (ja) * | 2002-12-17 | 2004-07-15 | Tokyo Electron Ltd | 開閉機構及び真空容器 |
| JP4559700B2 (ja) * | 2002-12-17 | 2010-10-13 | 東京エレクトロン株式会社 | 真空容器 |
| KR101149481B1 (ko) * | 2003-03-11 | 2012-05-24 | 티에스 코포레이션 가부시키가이샤 | 커버 작동장치 |