JPH0368794U - - Google Patents
Info
- Publication number
- JPH0368794U JPH0368794U JP13140889U JP13140889U JPH0368794U JP H0368794 U JPH0368794 U JP H0368794U JP 13140889 U JP13140889 U JP 13140889U JP 13140889 U JP13140889 U JP 13140889U JP H0368794 U JPH0368794 U JP H0368794U
- Authority
- JP
- Japan
- Prior art keywords
- arms
- pair
- article
- gripped
- gripping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 210000000078 claw Anatomy 0.000 claims description 2
- 230000003028 elevating effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989131408U JPH077114Y2 (ja) | 1989-11-09 | 1989-11-09 | 把持装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989131408U JPH077114Y2 (ja) | 1989-11-09 | 1989-11-09 | 把持装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0368794U true JPH0368794U (xx) | 1991-07-08 |
| JPH077114Y2 JPH077114Y2 (ja) | 1995-02-22 |
Family
ID=31678918
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989131408U Expired - Lifetime JPH077114Y2 (ja) | 1989-11-09 | 1989-11-09 | 把持装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH077114Y2 (xx) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012060226A1 (ja) * | 2010-11-02 | 2012-05-10 | 株式会社アルバック | 基板縦方向揺動装置、基板ステージ装置及びイオン注入装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6367090U (xx) * | 1986-10-20 | 1988-05-06 |
-
1989
- 1989-11-09 JP JP1989131408U patent/JPH077114Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6367090U (xx) * | 1986-10-20 | 1988-05-06 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012060226A1 (ja) * | 2010-11-02 | 2012-05-10 | 株式会社アルバック | 基板縦方向揺動装置、基板ステージ装置及びイオン注入装置 |
| JP2012099675A (ja) * | 2010-11-02 | 2012-05-24 | Ulvac Japan Ltd | 基板縦方向揺動装置、基板ステージ装置及びイオン注入装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH077114Y2 (ja) | 1995-02-22 |