JPH0365890U - - Google Patents

Info

Publication number
JPH0365890U
JPH0365890U JP12670989U JP12670989U JPH0365890U JP H0365890 U JPH0365890 U JP H0365890U JP 12670989 U JP12670989 U JP 12670989U JP 12670989 U JP12670989 U JP 12670989U JP H0365890 U JPH0365890 U JP H0365890U
Authority
JP
Japan
Prior art keywords
shaft
spiral groove
molecular pump
lubricating oil
turbo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12670989U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12670989U priority Critical patent/JPH0365890U/ja
Publication of JPH0365890U publication Critical patent/JPH0365890U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP12670989U 1989-10-30 1989-10-30 Pending JPH0365890U ( )

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12670989U JPH0365890U ( ) 1989-10-30 1989-10-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12670989U JPH0365890U ( ) 1989-10-30 1989-10-30

Publications (1)

Publication Number Publication Date
JPH0365890U true JPH0365890U ( ) 1991-06-26

Family

ID=31674505

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12670989U Pending JPH0365890U ( ) 1989-10-30 1989-10-30

Country Status (1)

Country Link
JP (1) JPH0365890U ( )

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