JPH0365849B2 - - Google Patents

Info

Publication number
JPH0365849B2
JPH0365849B2 JP58242723A JP24272383A JPH0365849B2 JP H0365849 B2 JPH0365849 B2 JP H0365849B2 JP 58242723 A JP58242723 A JP 58242723A JP 24272383 A JP24272383 A JP 24272383A JP H0365849 B2 JPH0365849 B2 JP H0365849B2
Authority
JP
Japan
Prior art keywords
pressure
movable plate
plate
movable
fixed plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58242723A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60133335A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP24272383A priority Critical patent/JPS60133335A/ja
Publication of JPS60133335A publication Critical patent/JPS60133335A/ja
Publication of JPH0365849B2 publication Critical patent/JPH0365849B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0005—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP24272383A 1983-12-22 1983-12-22 圧力センサ Granted JPS60133335A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24272383A JPS60133335A (ja) 1983-12-22 1983-12-22 圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24272383A JPS60133335A (ja) 1983-12-22 1983-12-22 圧力センサ

Publications (2)

Publication Number Publication Date
JPS60133335A JPS60133335A (ja) 1985-07-16
JPH0365849B2 true JPH0365849B2 (enrdf_load_stackoverflow) 1991-10-15

Family

ID=17093285

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24272383A Granted JPS60133335A (ja) 1983-12-22 1983-12-22 圧力センサ

Country Status (1)

Country Link
JP (1) JPS60133335A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE753728T1 (de) * 1995-07-14 1997-06-26 Yokogawa Electric Corp Halbleiter-Druckdifferenzmessvorrichtung

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1563894A (en) * 1976-03-12 1980-04-02 Kavlico Corp Capacitive pressure transducer and method for making same
JPS52123282A (en) * 1976-04-08 1977-10-17 Toshiba Corp Differential pressure transmitter

Also Published As

Publication number Publication date
JPS60133335A (ja) 1985-07-16

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