JPH0365248U - - Google Patents
Info
- Publication number
- JPH0365248U JPH0365248U JP12803589U JP12803589U JPH0365248U JP H0365248 U JPH0365248 U JP H0365248U JP 12803589 U JP12803589 U JP 12803589U JP 12803589 U JP12803589 U JP 12803589U JP H0365248 U JPH0365248 U JP H0365248U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- carriers
- carrier
- elevators
- pitches
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000969 carrier Substances 0.000 claims description 5
- 239000011295 pitch Substances 0.000 claims description 3
- 238000001125 extrusion Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Warehouses Or Storage Devices (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Description
第１図は本考案に係るウエーハ立替装置の斜視
図、第２図及び第３図は第１図の装置に載置され
るピツチの異なる第１及び第２のキヤリアの正面
図、第４図は第１図の装置の説明概略図、及び第
５図は従来のウエーハ立替機の概略図である。
１１……吸着ヘツド、１２……第１のキヤリア
、１３……第２のキヤリア、２２……第２のエレ
ベータ、２３……第１のエレベータ、２４……プ
ツシヤ。
FIG. 1 is a perspective view of a wafer stand-up device according to the present invention, FIGS. 2 and 3 are front views of first and second carriers with different pitches placed on the device of FIG. 1, and FIG. 4 1 is an explanatory schematic diagram of the apparatus shown in FIG. 1, and FIG. 5 is a schematic diagram of a conventional wafer advance machine. DESCRIPTION OF SYMBOLS 11... Suction head, 12... First carrier, 13... Second carrier, 22... Second elevator, 23... First elevator, 24... Pusher.
Claims (1)
キヤリアと、これらのキヤリアを上下動自在に載
置するよう互いに離間配置した一対のエレベータ
と、前記キヤリアの一方に配置したウエーハ押出
用プツシヤと、前記エレベータ間に配置され、前
記一方のキヤリアから他方のキヤリアにウエーハ
を吸着して水平移動させる吸着ヘツドとを具備し
、異なるピツチのキヤリア間でウエーハを移し替
え可能にしたことを特徴とするウエーハ立替装置
。 first and second carriers having different wafer storage pitches, a pair of elevators spaced apart from each other so as to place these carriers so as to be vertically movable, and a wafer extrusion pusher disposed on one of the carriers; A wafer comprising: a suction head disposed between the elevators to suction the wafer from the one carrier to the other carrier and move the wafer horizontally, so that the wafer can be transferred between carriers of different pitches. Advance equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12803589U JPH0365248U (en) | 1989-10-31 | 1989-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12803589U JPH0365248U (en) | 1989-10-31 | 1989-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0365248U true JPH0365248U (en) | 1991-06-25 |
Family
ID=31675768
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12803589U Pending JPH0365248U (en) | 1989-10-31 | 1989-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0365248U (en) |
-
1989
- 1989-10-31 JP JP12803589U patent/JPH0365248U/ja active Pending
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