JPH0364461U - - Google Patents
Info
- Publication number
- JPH0364461U JPH0364461U JP12589589U JP12589589U JPH0364461U JP H0364461 U JPH0364461 U JP H0364461U JP 12589589 U JP12589589 U JP 12589589U JP 12589589 U JP12589589 U JP 12589589U JP H0364461 U JPH0364461 U JP H0364461U
- Authority
- JP
- Japan
- Prior art keywords
- case
- oven
- stores
- solid element
- ion implantation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 4
- 239000007787 solid Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12589589U JPH0364461U (bg) | 1989-10-27 | 1989-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12589589U JPH0364461U (bg) | 1989-10-27 | 1989-10-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0364461U true JPH0364461U (bg) | 1991-06-24 |
Family
ID=31673745
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12589589U Pending JPH0364461U (bg) | 1989-10-27 | 1989-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0364461U (bg) |
-
1989
- 1989-10-27 JP JP12589589U patent/JPH0364461U/ja active Pending
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