JPS6370650U - - Google Patents
Info
- Publication number
- JPS6370650U JPS6370650U JP16487386U JP16487386U JPS6370650U JP S6370650 U JPS6370650 U JP S6370650U JP 16487386 U JP16487386 U JP 16487386U JP 16487386 U JP16487386 U JP 16487386U JP S6370650 U JPS6370650 U JP S6370650U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- group
- arc chamber
- filament
- conductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 claims description 3
- 229910000640 Fe alloy Inorganic materials 0.000 claims 1
- 239000002784 hot electron Substances 0.000 claims 1
- 230000000737 periodic effect Effects 0.000 claims 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16487386U JPS6370650U (bg) | 1986-10-27 | 1986-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16487386U JPS6370650U (bg) | 1986-10-27 | 1986-10-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6370650U true JPS6370650U (bg) | 1988-05-12 |
Family
ID=31094394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16487386U Pending JPS6370650U (bg) | 1986-10-27 | 1986-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6370650U (bg) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03222241A (ja) * | 1990-01-25 | 1991-10-01 | Tokyo Electron Ltd | イオン源装置 |
| JPH0416858U (bg) * | 1990-05-31 | 1992-02-12 |
-
1986
- 1986-10-27 JP JP16487386U patent/JPS6370650U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03222241A (ja) * | 1990-01-25 | 1991-10-01 | Tokyo Electron Ltd | イオン源装置 |
| JPH0416858U (bg) * | 1990-05-31 | 1992-02-12 |