JPH0363928U - - Google Patents
Info
- Publication number
- JPH0363928U JPH0363928U JP12635789U JP12635789U JPH0363928U JP H0363928 U JPH0363928 U JP H0363928U JP 12635789 U JP12635789 U JP 12635789U JP 12635789 U JP12635789 U JP 12635789U JP H0363928 U JPH0363928 U JP H0363928U
- Authority
- JP
- Japan
- Prior art keywords
- hole
- sealed space
- mask
- exposure
- wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 6
- 229910052757 nitrogen Inorganic materials 0.000 claims 3
- 238000007664 blowing Methods 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12635789U JPH0363928U (sh) | 1989-10-26 | 1989-10-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12635789U JPH0363928U (sh) | 1989-10-26 | 1989-10-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0363928U true JPH0363928U (sh) | 1991-06-21 |
Family
ID=31674171
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12635789U Pending JPH0363928U (sh) | 1989-10-26 | 1989-10-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0363928U (sh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010040831A (ja) * | 2008-08-06 | 2010-02-18 | Orc Mfg Co Ltd | 露光装置における基板の露光方法 |
-
1989
- 1989-10-26 JP JP12635789U patent/JPH0363928U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010040831A (ja) * | 2008-08-06 | 2010-02-18 | Orc Mfg Co Ltd | 露光装置における基板の露光方法 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH0363928U (sh) | ||
JPS63176535U (sh) | ||
JPH02124535U (sh) | ||
JPH0480554U (sh) | ||
JPH01178093U (sh) | ||
JPS61130355U (sh) | ||
JPS61156942U (sh) | ||
JPS6415150U (sh) | ||
JPS61170451U (sh) | ||
JPS62108899U (sh) | ||
JPS58145417U (ja) | 通風機能付きガス台 | |
JPS6356720U (sh) | ||
JPH02139270U (sh) | ||
JPS5996170U (ja) | 二重構造容器 | |
JPS63166406U (sh) | ||
JPS62100841U (sh) | ||
JPH01166869U (sh) | ||
JPH037847U (sh) | ||
JPS6413659U (sh) | ||
JPH0382505U (sh) | ||
JPS6255800U (sh) | ||
JPS6038059U (ja) | 内部通風形回転電機 | |
JPS5930289U (ja) | パチンコ台ユニツト | |
JPH01172854U (sh) | ||
JPS6026803U (ja) | 加工機における被加工物固定テ−ブル |