JPH0363582U - - Google Patents
Info
- Publication number
- JPH0363582U JPH0363582U JP12274489U JP12274489U JPH0363582U JP H0363582 U JPH0363582 U JP H0363582U JP 12274489 U JP12274489 U JP 12274489U JP 12274489 U JP12274489 U JP 12274489U JP H0363582 U JPH0363582 U JP H0363582U
- Authority
- JP
- Japan
- Prior art keywords
- bubbler
- carrier gas
- raw material
- liquid raw
- integration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012159 carrier gas Substances 0.000 claims description 7
- 239000002994 raw material Substances 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 6
- 230000010354 integration Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12274489U JPH0363582U (ko) | 1989-10-19 | 1989-10-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12274489U JPH0363582U (ko) | 1989-10-19 | 1989-10-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0363582U true JPH0363582U (ko) | 1991-06-20 |
Family
ID=31670737
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12274489U Pending JPH0363582U (ko) | 1989-10-19 | 1989-10-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0363582U (ko) |
-
1989
- 1989-10-19 JP JP12274489U patent/JPH0363582U/ja active Pending
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