JPH0363582U - - Google Patents
Info
- Publication number
- JPH0363582U JPH0363582U JP12274489U JP12274489U JPH0363582U JP H0363582 U JPH0363582 U JP H0363582U JP 12274489 U JP12274489 U JP 12274489U JP 12274489 U JP12274489 U JP 12274489U JP H0363582 U JPH0363582 U JP H0363582U
- Authority
- JP
- Japan
- Prior art keywords
- bubbler
- carrier gas
- raw material
- liquid raw
- integration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012159 carrier gas Substances 0.000 claims description 7
- 239000002994 raw material Substances 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 6
- 230000010354 integration Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は本考案装置の一実施例を示し、同図ａ
はその原料供給系を示す部分概略図、同図ｂはそ
の回路系を示す回路図、第２図は従来装置を示す
概略図である。
１……バブラ、２……液体原料、３……導入管
、４……導出管、１５……積算回路、１７……表
示回路、Ｓ１……バルブ動作信号、Ｓ２……キヤ
リアガス信号。
Figure 1 shows an embodiment of the device of the present invention;
2 is a partial schematic diagram showing the raw material supply system, FIG. 2B is a circuit diagram showing the circuit system, and FIG. 2 is a schematic diagram showing the conventional apparatus. DESCRIPTION OF SYMBOLS 1... Bubbler, 2... Liquid raw material, 3... Inlet pipe, 4... Outlet pipe, 15... Integration circuit, 17... Display circuit, S1... Valve operation signal, S2... Carrier gas signal.
Claims (1)
ブラに接続され、上記バブラ外部からキヤリアガ
スを上記バブラ内部の上記液体原料中に導入する
導入管と、一端が上記バブラに接続され、上記バ
ブラ内部から上記キヤリアガスを上記バブラ外部
に導出する導出管と、上記バブラに導入されるキ
ヤリアガス流量を検出するキヤリアガス流量検出
手段と、該キヤリアガス量検出手段から得られる
情報に基づく値を積算する積算手段と、該積算手
段から得られる積算情報に基づき、上記液体原料
の総消費量あるいは残量からなる液体原料情報の
出力を行う出力手段と、を備えることを特徴とす
る液体原料供給装置。 a bubbler filled with a liquid raw material; an introduction pipe having one end connected to the bubbler and introducing a carrier gas from outside the bubbler into the liquid raw material inside the bubbler; and an introduction pipe having one end connected to the bubbler and introducing a carrier gas from the inside of the bubbler a lead-out pipe for leading out the carrier gas to the outside of the bubbler; a carrier gas flow rate detection means for detecting the carrier gas flow rate introduced into the bubbler; and an integration means for integrating values based on information obtained from the carrier gas amount detection means; A liquid raw material supply device comprising: output means for outputting liquid raw material information consisting of the total consumed amount or remaining amount of the liquid raw material based on the integration information obtained from the integration means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12274489U JPH0363582U (en) | 1989-10-19 | 1989-10-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12274489U JPH0363582U (en) | 1989-10-19 | 1989-10-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0363582U true JPH0363582U (en) | 1991-06-20 |
Family
ID=31670737
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12274489U Pending JPH0363582U (en) | 1989-10-19 | 1989-10-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0363582U (en) |
-
1989
- 1989-10-19 JP JP12274489U patent/JPH0363582U/ja active Pending
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