JPH0363571U - - Google Patents
Info
- Publication number
- JPH0363571U JPH0363571U JP12500289U JP12500289U JPH0363571U JP H0363571 U JPH0363571 U JP H0363571U JP 12500289 U JP12500289 U JP 12500289U JP 12500289 U JP12500289 U JP 12500289U JP H0363571 U JPH0363571 U JP H0363571U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- reaction tube
- gas supply
- supply pipe
- susceptor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 3
- 229910001882 dioxygen Inorganic materials 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims description 3
- 238000001947 vapour-phase growth Methods 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 5
- 238000010438 heat treatment Methods 0.000 claims 2
- 238000011144 upstream manufacturing Methods 0.000 claims 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989125002U JP2526852Y2 (ja) | 1989-10-25 | 1989-10-25 | 酸化物超伝導薄膜の気相成長装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989125002U JP2526852Y2 (ja) | 1989-10-25 | 1989-10-25 | 酸化物超伝導薄膜の気相成長装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0363571U true JPH0363571U (id) | 1991-06-20 |
JP2526852Y2 JP2526852Y2 (ja) | 1997-02-26 |
Family
ID=31672891
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989125002U Expired - Fee Related JP2526852Y2 (ja) | 1989-10-25 | 1989-10-25 | 酸化物超伝導薄膜の気相成長装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2526852Y2 (id) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101231205B1 (ko) * | 2011-08-01 | 2013-02-07 | (주)용진일렉콤 | 광케이블용 컨넥터 어셈블리 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63307277A (ja) * | 1987-06-05 | 1988-12-14 | Kawasaki Steel Corp | 金属酸化物薄膜作製用の光mocvd装置 |
JPH01201482A (ja) * | 1987-10-01 | 1989-08-14 | Nippon Aneruba Kk | 減圧気相成長装置 |
-
1989
- 1989-10-25 JP JP1989125002U patent/JP2526852Y2/ja not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63307277A (ja) * | 1987-06-05 | 1988-12-14 | Kawasaki Steel Corp | 金属酸化物薄膜作製用の光mocvd装置 |
JPH01201482A (ja) * | 1987-10-01 | 1989-08-14 | Nippon Aneruba Kk | 減圧気相成長装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101231205B1 (ko) * | 2011-08-01 | 2013-02-07 | (주)용진일렉콤 | 광케이블용 컨넥터 어셈블리 |
Also Published As
Publication number | Publication date |
---|---|
JP2526852Y2 (ja) | 1997-02-26 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |