JPH0361930U - - Google Patents

Info

Publication number
JPH0361930U
JPH0361930U JP12302789U JP12302789U JPH0361930U JP H0361930 U JPH0361930 U JP H0361930U JP 12302789 U JP12302789 U JP 12302789U JP 12302789 U JP12302789 U JP 12302789U JP H0361930 U JPH0361930 U JP H0361930U
Authority
JP
Japan
Prior art keywords
chamber
opening
curved portion
window portion
worker
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12302789U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12302789U priority Critical patent/JPH0361930U/ja
Publication of JPH0361930U publication Critical patent/JPH0361930U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Devices For Use In Laboratory Experiments (AREA)
JP12302789U 1989-10-19 1989-10-19 Pending JPH0361930U ( )

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12302789U JPH0361930U ( ) 1989-10-19 1989-10-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12302789U JPH0361930U ( ) 1989-10-19 1989-10-19

Publications (1)

Publication Number Publication Date
JPH0361930U true JPH0361930U ( ) 1991-06-18

Family

ID=31671020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12302789U Pending JPH0361930U ( ) 1989-10-19 1989-10-19

Country Status (1)

Country Link
JP (1) JPH0361930U ( )

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002195636A (ja) * 2000-12-27 2002-07-10 Sankyo Seiki Mfg Co Ltd クリーン作業モジュール及びクリーントンネル
JP2002195620A (ja) * 2000-12-27 2002-07-10 Sankyo Seiki Mfg Co Ltd クリーン作業モジュール及びクリーントンネル

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002195636A (ja) * 2000-12-27 2002-07-10 Sankyo Seiki Mfg Co Ltd クリーン作業モジュール及びクリーントンネル
JP2002195620A (ja) * 2000-12-27 2002-07-10 Sankyo Seiki Mfg Co Ltd クリーン作業モジュール及びクリーントンネル

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