JPH0361349U - - Google Patents

Info

Publication number

JPH0361349U

JPH0361349U JP12090189U JP12090189U JPH0361349U JP H0361349 U JPH0361349 U JP H0361349U JP 12090189 U JP12090189 U JP 12090189U JP 12090189 U JP12090189 U JP 12090189U JP H0361349 U JPH0361349 U JP H0361349U

Authority

JP

Japan

Prior art keywords

lsi

nozzle

cooling fluid

block

module

Prior art date

1989-10-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000012809 cooling fluid Substances 0.000 claims 3
• 238000001816 cooling Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 4
• 238000007654 immersion Methods 0.000 description 1
• 239000007788 liquid Substances 0.000 description 1
• 230000004048 modification Effects 0.000 description 1
• 238000012986 modification Methods 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1

Cited By (3)