JPH0361330U - - Google Patents

Info

Publication number
JPH0361330U
JPH0361330U JP12198789U JP12198789U JPH0361330U JP H0361330 U JPH0361330 U JP H0361330U JP 12198789 U JP12198789 U JP 12198789U JP 12198789 U JP12198789 U JP 12198789U JP H0361330 U JPH0361330 U JP H0361330U
Authority
JP
Japan
Prior art keywords
substrate
surface treatment
transmission means
treatment apparatus
discharging nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12198789U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0810184Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989121987U priority Critical patent/JPH0810184Y2/ja
Publication of JPH0361330U publication Critical patent/JPH0361330U/ja
Application granted granted Critical
Publication of JPH0810184Y2 publication Critical patent/JPH0810184Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP1989121987U 1989-10-17 1989-10-17 基板の表面処理装置 Expired - Lifetime JPH0810184Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989121987U JPH0810184Y2 (ja) 1989-10-17 1989-10-17 基板の表面処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989121987U JPH0810184Y2 (ja) 1989-10-17 1989-10-17 基板の表面処理装置

Publications (2)

Publication Number Publication Date
JPH0361330U true JPH0361330U (cs) 1991-06-17
JPH0810184Y2 JPH0810184Y2 (ja) 1996-03-27

Family

ID=31670008

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989121987U Expired - Lifetime JPH0810184Y2 (ja) 1989-10-17 1989-10-17 基板の表面処理装置

Country Status (1)

Country Link
JP (1) JPH0810184Y2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101457871B1 (ko) * 2013-05-13 2014-11-06 한국성전(주) 테이프 재단용 금형

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5844850U (ja) * 1981-09-21 1983-03-25 日本電気ホームエレクトロニクス株式会社 無塵搬送装置
JPS62261126A (ja) * 1986-05-08 1987-11-13 Dainippon Screen Mfg Co Ltd 表面処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5844850U (ja) * 1981-09-21 1983-03-25 日本電気ホームエレクトロニクス株式会社 無塵搬送装置
JPS62261126A (ja) * 1986-05-08 1987-11-13 Dainippon Screen Mfg Co Ltd 表面処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101457871B1 (ko) * 2013-05-13 2014-11-06 한국성전(주) 테이프 재단용 금형

Also Published As

Publication number Publication date
JPH0810184Y2 (ja) 1996-03-27

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term