JPH0360041B2 - - Google Patents

Info

Publication number
JPH0360041B2
JPH0360041B2 JP22785883A JP22785883A JPH0360041B2 JP H0360041 B2 JPH0360041 B2 JP H0360041B2 JP 22785883 A JP22785883 A JP 22785883A JP 22785883 A JP22785883 A JP 22785883A JP H0360041 B2 JPH0360041 B2 JP H0360041B2
Authority
JP
Japan
Prior art keywords
slit
length
length measurement
mark
slits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP22785883A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60120215A (ja
Inventor
Hitoshi Sakamoto
Etsuo Nagashima
Makoto Nagai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP22785883A priority Critical patent/JPS60120215A/ja
Publication of JPS60120215A publication Critical patent/JPS60120215A/ja
Publication of JPH0360041B2 publication Critical patent/JPH0360041B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
JP22785883A 1983-12-02 1983-12-02 光電式変位検出装置 Granted JPS60120215A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22785883A JPS60120215A (ja) 1983-12-02 1983-12-02 光電式変位検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22785883A JPS60120215A (ja) 1983-12-02 1983-12-02 光電式変位検出装置

Publications (2)

Publication Number Publication Date
JPS60120215A JPS60120215A (ja) 1985-06-27
JPH0360041B2 true JPH0360041B2 (enrdf_load_stackoverflow) 1991-09-12

Family

ID=16867463

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22785883A Granted JPS60120215A (ja) 1983-12-02 1983-12-02 光電式変位検出装置

Country Status (1)

Country Link
JP (1) JPS60120215A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2386832B1 (en) 2010-05-10 2017-04-12 Mitutoyo Corporation Photoelectric encoder

Also Published As

Publication number Publication date
JPS60120215A (ja) 1985-06-27

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees