JPH0359362U - - Google Patents
Info
- Publication number
- JPH0359362U JPH0359362U JP11892189U JP11892189U JPH0359362U JP H0359362 U JPH0359362 U JP H0359362U JP 11892189 U JP11892189 U JP 11892189U JP 11892189 U JP11892189 U JP 11892189U JP H0359362 U JPH0359362 U JP H0359362U
- Authority
- JP
- Japan
- Prior art keywords
- side chamber
- opening
- input side
- valve
- output side
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 6
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Safety Valves (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11892189U JPH0359362U (sv) | 1989-10-11 | 1989-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11892189U JPH0359362U (sv) | 1989-10-11 | 1989-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0359362U true JPH0359362U (sv) | 1991-06-11 |
Family
ID=31667062
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11892189U Pending JPH0359362U (sv) | 1989-10-11 | 1989-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0359362U (sv) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001036851A1 (fr) * | 1999-11-18 | 2001-05-25 | Asahi Organic Chemicals Industry Co., Ltd. | Regulateur de pression constante |
-
1989
- 1989-10-11 JP JP11892189U patent/JPH0359362U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001036851A1 (fr) * | 1999-11-18 | 2001-05-25 | Asahi Organic Chemicals Industry Co., Ltd. | Regulateur de pression constante |
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