JPH0359189U - - Google Patents

Info

Publication number
JPH0359189U
JPH0359189U JP11898689U JP11898689U JPH0359189U JP H0359189 U JPH0359189 U JP H0359189U JP 11898689 U JP11898689 U JP 11898689U JP 11898689 U JP11898689 U JP 11898689U JP H0359189 U JPH0359189 U JP H0359189U
Authority
JP
Japan
Prior art keywords
wafer
wafer holder
cover
transfer device
reciprocates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11898689U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11898689U priority Critical patent/JPH0359189U/ja
Publication of JPH0359189U publication Critical patent/JPH0359189U/ja
Pending legal-status Critical Current

Links

JP11898689U 1989-10-11 1989-10-11 Pending JPH0359189U (US06653308-20031125-C00199.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11898689U JPH0359189U (US06653308-20031125-C00199.png) 1989-10-11 1989-10-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11898689U JPH0359189U (US06653308-20031125-C00199.png) 1989-10-11 1989-10-11

Publications (1)

Publication Number Publication Date
JPH0359189U true JPH0359189U (US06653308-20031125-C00199.png) 1991-06-11

Family

ID=31667124

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11898689U Pending JPH0359189U (US06653308-20031125-C00199.png) 1989-10-11 1989-10-11

Country Status (1)

Country Link
JP (1) JPH0359189U (US06653308-20031125-C00199.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2011010460A1 (ja) * 2009-07-21 2012-12-27 株式会社ニコン 基板ホルダ、基板ホルダ対、基板接合装置およびデバイスの製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6216924A (ja) * 1985-05-04 1987-01-26 Seibu Giken:Kk 流体によつて板状体を無接触状態で懸垂浮遊させる方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6216924A (ja) * 1985-05-04 1987-01-26 Seibu Giken:Kk 流体によつて板状体を無接触状態で懸垂浮遊させる方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2011010460A1 (ja) * 2009-07-21 2012-12-27 株式会社ニコン 基板ホルダ、基板ホルダ対、基板接合装置およびデバイスの製造方法
JP5686097B2 (ja) * 2009-07-21 2015-03-18 株式会社ニコン 基板ホルダ、基板ホルダ対および基板接合装置

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